Low-voltage coefficient capacitors for VLSI processes
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[1] B. E. Deal,et al. Thermal Oxidation of Heavily Doped Silicon , 1965 .
[2] Thermal Oxidation of Arsenic‐Diffused Silicon , 1978 .
[3] James D. Meindl,et al. Thermal Oxidation of Heavily Phosphorus‐Doped Silicon , 1978 .
[4] E. Irene,et al. Silicon Oxidation Studies: The Oxidation of Heavily B‐ and P‐Doped Single Crystal Silicon , 1978 .
[5] TEM study of the two‐step annealing of arsenic‐implanted 〈100〉 silicon , 1979 .
[6] James D. Plummer,et al. Si / SiO2 Interface Oxidation Kinetics: A Physical Model for the Influence of High Substrate Doping Levels I . Theory , 1979 .
[7] Mitsumasa Koyanagi,et al. Intermediate Oxide Formation in Double‐Polysilicon Gate MOS Structure , 1980 .
[8] Dopant dependence of the oxidation rate of ion implanted silicon , 1980 .
[9] J. McCreary. Matching properties, and voltage and temperature dependence of MOS capacitors , 1981 .
[10] C. Christodoulides,et al. Thermal oxidation of ion implanted silicon , 1981 .
[11] W.C. Black,et al. Technological design considerations for monolithic MOS switched-capacitor filtering systems , 1983, Proceedings of the IEEE.
[12] J.E. Schroeder,et al. Analog CMOS Building Blocks for Custom and Semicustom Applications , 1984, IEEE Journal of Solid-State Circuits.
[13] Eric A. Vittoz. The Design of High-Performance Analog Circuits on Digital CMOS Chips , 1985 .
[14] L. Faraone,et al. Characterization of thermally oxidized n+polycrystalline silicon , 1985, IEEE Transactions on Electron Devices.
[15] T. Nakagawa,et al. Advanced analog CMOS technology , 1985, 1985 International Electron Devices Meeting.
[16] Fabrication of NMOS capacitors with a low-voltage coefficient at a silicon foundry , 1985, IEEE Electron Device Letters.
[17] Perfect hillockless metallization (PHM) process for VLSI , 1986, 1986 International Electron Devices Meeting.
[18] In situ arsenic-doped polysilicon for VLSI applications , 1986, IEEE Transactions on Electron Devices.
[19] Fabrication of High Quality Capacitors by Impurity Enhanced Oxidation , 1988 .