论文信息 - Gettering Effect with Al Implanted into 4H-SiC CVD Epitaxial Layers - 字舞流文

Gettering Effect with Al Implanted into 4H-SiC CVD Epitaxial Layers

A. Hallén | G. Pensl | S. Reshanov | A. Konstantinov | E. Kalinina | A. Sitnikova | R. R. Yafaev | V. Kossov | G. Kholuyanov