ISE and ISFET microsensors based on a sensitive chalcogenide glass for copper ion detection in solution

Abstract All solid state ion microsensors based either on a potentiometric or a FET transducer with chalcogenide glass membranes sensitive to Cu 2+ -ions in solution have been developed. The membrane material was deposited by RF co-sputtering of Ge 28 Se 60 Sb 12 chalcogenide glass and metal copper. The resulting films highly doped with copper were characterised using electron microscopy and electron microprobe analysis. The method of photolithographic patterning of the chalcogenide membrane deposited on a wafer carrying the ISFET structures is presented. Analytical behavior of developed sensors were fully characterised in terms of sensitivity, selectivity, limit of detection, response time and time stability.