论文信息 - A monolithically integrated surface micromachined touch mode capacitive pressure sensor

A monolithically integrated surface micromachined touch mode capacitive pressure sensor

Abstract A monolithically integrated surface micromachined touch mode capacitive pressure sensor and its interface circuits are presented. The device includes the capacitance to voltage, and capacitance to frequency converters on the same chip. The sensor is fabricated using a surface micromachining technology, which is processed simultaneously with a conventional 2.0-μm double-poly, double-metal n-well CMOS process. The performance of the integrated sensor meets the design specifications of good linearity and good stability. Evaluation results on the completed `sensor and circuit' chip are presented.

[1] Igor M. Filanovsky,et al. CMOS Schmitt trigger design , 1994 .

[2] Wen H. Ko,et al. Modeling of circular diaphragm and spreadsheet solution programming for touch mode capacitive sensors , 1999 .

[3] W. H. Ko,et al. An integrated interfacing circuit for capacitive sensors , 1994 .

[4] Lars Rosengren,et al. Micromachined sensor structures with linear capacitive response , 1992 .

[5] K. Wise,et al. A batch-fabricated silicon capacitive pressure transducer with low temperature sensitivity , 1982, IEEE Transactions on Electron Devices.

[6] Kensall D. Wise,et al. A High-accuracy Multi-element Silicon Barometric Pressure Sensor , 1995, Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95.

[7] Willy Sansen,et al. A capacitive pressure sensor with low impedance output and active suppression of parasitic effects , 1990 .

[8] Wen H. Ko,et al. Touch mode capacitive pressure sensors , 1999 .

[9] Minhang Bao,et al. Study on linearization of silicon capacitive pressure sensors , 1997 .