A balanced dual-diaphragm resonant pressure sensor in silicon
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[1] 0n the Use of Resonant Diaphragms as FM Pressure Transducers , 1978, IEEE Transactions on Industrial Electronics and Control Instrumentation.
[2] J. Lasky. Wafer bonding for silicon‐on‐insulator technologies , 1986 .
[3] K. Ikeda,et al. Silicon pressure sensor integrates resonant strain gauge on diaphragm , 1990 .
[4] Harrie A.C. Tilmans,et al. Resonant diaphragm pressure measurement system with ZnO on Si excitation , 1983 .
[5] M. Shimbo,et al. Silicon‐to‐silicon direct bonding method , 1986 .
[6] J. Greenwood. Etched silicon vibrating sensor , 1984 .
[7] A. Reisman,et al. The Controlled Etching of Silicon in Catalyzed Ethylenediamine‐Pyrocatechol‐Water Solutions , 1979 .
[8] B. Culshaw,et al. Optically excited resonant beam pressure sensor , 1987 .