Design and calibration method for microvision three-dimensional laser scanner

A microvision three-dimensional (3D) laser scanner with micron accuracy and the calibration method are presented in this article. The system is designed to measure and reconstruct the 3D shape of miniature objects. A new two-step calibration method is proposed to reduce measurement errors and improve the measurement precision. Repeated measurements show that the repeatability is better than ±1μm. Moreover, the system has been successfully applied to extracting the height of solder pastes, which is beneficial in surface mount technology quality control.