Modelling and experimental study of machined depth in AFM-based milling of nanochannels
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Yongda Yan | Yanquan Geng | Xuesen Zhao | Xuesen Zhao | Yongda Yan | Y. Geng | Zhenjiang Hu | Yangming Xing | Zhenjiang Hu | Yangming Xing | Zhenjiang Hu | Yanquan Geng
[1] N. Jiao,et al. Nanochannel system fabricated by MEMS microfabrication and atomic force microscopy. , 2011, IET nanobiotechnology.
[2] C. Chou,et al. Fabrication of Size-Controllable Nanofluidic Channels by Nanoimprinting and Its Application for DNA Stretching , 2004 .
[3] B. Bhushan,et al. Scanning and transmission electron microscopies of single-crystal silicon microworn/machined using atomic force microscopy , 1997 .
[4] John A. Dagata,et al. Device Fabrication by Scanned Probe Oxidation , 1995, Science.
[5] Mauro Ferrari,et al. Nanoengineered device for drug delivery application , 2004 .
[6] B. Bhushan,et al. Material removal mechanisms of single-crystal silicon on nanoscale and at ultralow loads , 1998 .
[7] Shen Dong,et al. Investigation on AFM-based micro/nano-CNC machining system , 2007 .
[8] S. Kandlikar,et al. Review of fabrication of nanochannels for single phase liquid flow , 2006 .
[9] Tao Sun,et al. Top-down nanomechanical machining of three-dimensional nanostructures by atomic force microscopy. , 2010, Small.
[10] K. Hokkirigawa,et al. An experimental and theoretical investigation of ploughing, cutting and wedge formation during abrasive wear , 1988 .
[11] Miko Elwenspoek,et al. Institute of Physics Publishing Journal of Micromechanics and Microengineering Wet Anisotropic Etching for Fluidic 1d Nanochannels , 2022 .
[12] Zone-Ching Lin,et al. A calculating method for the fewest cutting passes on sapphire substrate at a certain depth using specific down force energy with an AFM probe , 2012 .
[13] Zaili Dong,et al. Atomic force microscopy-based repeated machining theory for nanochannels on silicon oxide surfaces , 2011 .
[14] F. P. Bowden,et al. The Friction and Lubrication of Solids , 1964 .
[15] A. van den Berg,et al. Micromachining of buried micro channels in silicon , 2000, Journal of Microelectromechanical Systems.
[16] Xu,et al. "Dip-Pen" nanolithography , 1999, Science.
[18] D. Tabor. Hardness of Metals , 1937, Nature.
[19] U. Wejinya,et al. Atomic force microscopy based repeatable surface nanomachining for nanochannels on silicon substrates , 2012 .
[20] S. Kassavetis,et al. Nanoscale patterning and deformation of soft matter by scanning probe microscopy , 2007 .
[21] B. Bhushan,et al. Introduction to Tribology , 2002 .
[22] Simon S. Park,et al. Atomic force microscope probe-based nanometric scribing , 2010 .
[23] Brian R. Bennett,et al. Nanostructure patterns written in III–V semiconductors by an atomic force microscope , 1997 .
[24] Tao Sun,et al. Fabrication of millimeter scale nanochannels using the AFM tip-based nanomachining method , 2013 .
[25] Jane E. Curtin,et al. Nanochannel fabrication for chemical sensors , 1997 .