Input and Design Optimization Under Uncertainty to Minimize the Impact Velocity of an Electrostatically Actuated MEMS Switch

The dynamic response of a radio-frequency micro-electro mechanical system (RF MEMS) to a time-varying electrostatic force is optimized to enhance robustness to variations in material properties and geometry. The device functions as an electrical switch, where an applied voltage is used to close a circuit. The objective is to minimize the severity of the mechanical impact that occurs each time the switch closes, because severe impacts have been found to significantly decrease the life of these switches. Previous works have demonstrated that a classical vibro-impact model, a single degree-of-freedom oscillator subject to mechanical impact with a single rigid barrier, captures the relevant physics adequately. Certain model parameters are de

[1]  M. Omizo,et al.  Modeling , 1983, Encyclopedic Dictionary of Archaeology.

[2]  Hartono Sumali,et al.  Waveform design for pulse-and-hold electrostatic actuation in MEMS , 2007 .

[3]  Dan M. Frangopol,et al.  Reliability-based analysis and design optimization of electrostatically actuated MEMS , 2004 .

[4]  Gabriel M. Rebeiz.  RF MEMS: Theory, Design and Technology , 2003 .

[5]  William Singhose,et al.  A comparison of input shaping and time-optimal flexible-body control , 1997 .

[6]  Hartono Sumali,et al.  Modeling, simulation, and testing of the mechanical dynamics of an RF MEMS switch , 2005, 2005 International Conference on MEMS,NANO and Smart Systems.

[7]  Demeter G. Fertis,et al.  Mechanical And Structural Vibrations , 1995 .

[8]  J. W. Wittwer,et al.  Robust design and model validation of nonlinear compliant micromechanisms , 2005, Journal of Microelectromechanical Systems.

[9]  D. Czaplewski,et al.  A Soft-Landing Waveform for Actuation of a Single-Pole Single-Throw Ohmic RF MEMS Switch , 2005, Journal of Microelectromechanical Systems.

[10]  David S. Epp,et al.  Development and calibration of a stochastic dynamics model for the design of a MEMS inertial switch , 2006 .

[11]  Jeong Sam Han,et al.  Robust optimization using a gradient index: MEMS applications , 2004 .

[12]  Hartono Sumali,et al.  Structural Dynamics of an RF MEMS Switch , 2005 .

[13]  C. D. Rios,et al.  RF MEMS from a device perspective , 2000 .

[14]  Douglas Newton.  What is Design and Technology , 2005 .

[15]  Wilson H. Tang,et al.  Probability concepts in engineering planning and design , 1984 .

[16]  C. D. Perttunen,et al.  Lipschitzian optimization without the Lipschitz constant , 1993 .

[17]  A. H. S. Ang,et al.  Probability Concepts in Engineering Planning and Design Volume II Decision , 1984 .

[18]  Warren P. Seering,et al.  Controlling velocity-limited systems to reduce residual vibration , 1988, Proceedings. 1988 IEEE International Conference on Robotics and Automation.

[19]  H. Madsen.  First order vs. second order reliability analysis of series structures , 1985 .

[20]  Dan M. Frangopol,et al.  Reliability-based design of MEMS mechanisms by topology optimization , 2003 .

[21]  Patrick Sean Finnegan,et al.  Fabrication and characterization of ohmic contacting RF MEMS switches , 2004, SPIE MOEMS-MEMS.

[22]  Jeffrey C. Lagarias,et al.  Convergence Properties of the Nelder-Mead Simplex Method in Low Dimensions , 1998, SIAM J. Optim..