High performance 40 nm vertical MOSFET within a conventional CMOS process flow
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T. Skotnicki | A. Villaret | M. Jurczak | E. Josse | M. Paoli | P. Ribot | B. Tormen | E. Sondergard | D. Dufartre
[1] L. Risch,et al. Vertical MOS Transistors with 70nm Channel Length , 1995, ESSDERC '95: Proceedings of the 25th European Solid State Device Research Conference.