An integrated release and dispatch policy for semiconductor wafer fabrication

This paper presents an integrated release and dispatch policy for semiconductor wafer fabrication. In this policy, the concept of virtual production lines (VPLs) is first introduced to allocate production time for each process step, and the average queuing time information is derived from the target WIP distribution which is obtained by simulations. Then, a pull VPLs-based effective-workload control (EWL-n-Ctrl) policy is proposed to control the release process, and a queuing time ratio (QTR) rule is put forward to control the dispatch process. The behaviour of EWL-n-Ctrl is analysed using the Mini-Fab model. Results of the numerical experiments show that the integrated release and dispatch policy (EWL-n-Ctrl+QTR) outperforms common rule-based scheduling policies in terms of the average cycle time, the standard deviation of the cycle time and the work in process under a prescribed throughput level. A simulation study into the effect of capacity utilisation levels and product mix ratios is also carried out.

[1]  Zhibin Jiang,et al.  A dynamic WIP control strategy for bottlenecks in a wafer fabrication system , 2010 .

[2]  Stanley B. Gershwin,et al.  An efficient new job release control methodology , 2009 .

[3]  Russ M. Dabbas,et al.  Mining semiconductor manufacturing data for productivity improvement - an integrated relational database approach , 2001, Comput. Ind..

[4]  P. J. Miller,et al.  The operating curve: a method to measure and benchmark manufacturing line productivity , 1997, 1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop ASMC 97 Proceedings.

[5]  J D Littler,et al.  A PROOF OF THE QUEUING FORMULA , 1961 .

[6]  Wolfgang Bechte.  Theory and practice of load-oriented manufacturing control , 1988 .

[7]  J. Bertrand.  The Effect of Workload Dependent Due-Dates on Job Shop Performance , 1983 .

[8]  Michael E. Kuhl,et al.  A simulation study of new multi-objective composite dispatching rules, CONWIP, and push lot release in semiconductor fabrication , 2008 .

[9]  Shu Li,et al.  Minimum inventory variability schedule with applications in semiconductor fabrication , 1996 .

[10]  Mauricio G. C. Resende,et al.  Closed-loop job release control for VLSI circuit manufacturing , 1988 .

[11]  Ari P. J. Vepsalainen.  Priority rules for job shops with weighted tardiness costs , 1987 .

[12]  C. Roger Glassey,et al.  Bottleneck Starvation Indicators for Shop Floor Control , 1988 .

[13]  Robin G. Qiu,et al.  Virtual production line based WIP control for semiconductor manufacturing systems , 2005 .

[14]  Hu Kim Hyung-Un Kim,et al.  Batching and scheduling at batch processing workstation in a semiconductior fabrication facility producing multiple product types with distinct due dates , 2000 .

[15]  Michael Gregory,et al.  Manufacturing Systems Engineering , 2015 .

[16]  Yeong-Dae Kim,et al.  Production scheduling in a semiconductor wafer fabrication facility producing multiple product types with distinct due dates , 2001, IEEE Trans. Robotics Autom..

[17]  C. R. Glassey,et al.  Bottleneck starvation indicators for shop floor control (semiconductor manufacturing process) , 1988 .

[18]  Vincent A. Mabert,et al.  AN EVALUATION OF ORDER RELEASE MECHANISMS IN A JOB-SHOP ENVIRONMENT , 1988 .

[19]  S.C.H. Lu,et al.  Efficient scheduling policies to reduce mean and variance of cycle-time in semiconductor manufacturing plants , 1994 .

[20]  Fei Qiao,et al.  A Lot Dispatching Strategy Integrating WIP Management and Wafer Start Control , 2007, IEEE Transactions on Automation Science and Engineering.

[21]  Shengwei Ding,et al.  Queueing Theory for Semiconductor Manufacturing Systems: A Survey and Open Problems , 2007, IEEE Transactions on Automation Science and Engineering.

[22]  Jwm Will Bertrand,et al.  The use of workload information to control job lateness in controlled and uncontrolled release production systems , 1983 .

[23]  Michael Pinedo,et al.  Scheduling: Theory, Algorithms, and Systems , 1994 .

[24]  David L. Woodruff,et al.  CONWIP: a pull alternative to kanban , 1990 .

[25]  M. Mathirajan,et al.  A literature review, classification and simple meta-analysis on scheduling of batch processors in semiconductor , 2006 .

[26]  Averill M. Law,et al.  Simulation Modeling and Analysis , 1982 .

[27]  Subhash C. Sarin,et al.  A survey of dispatching rules for operational control in wafer fabrication , 2011 .

[28]  Arnold H. Buss,et al.  SHIFTING PRODUCTION BOTTLENECKS: CAUSES, CURES, AND CONUNDRUMS , 2009 .

[29]  J.W. Fowler,et al.  Balanced Machine Workload Dispatching Scheme for Wafer Fab , 2007, 2007 IEEE/SEMI Advanced Semiconductor Manufacturing Conference.

[30]  Reha Uzsoy,et al.  A REVIEW OF PRODUCTION PLANNING AND SCHEDULING MODELS IN THE SEMICONDUCTOR INDUSTRY PART I: SYSTEM CHARACTERISTICS, PERFORMANCE EVALUATION AND PRODUCTION PLANNING , 1992 .

[31]  J. Little.  A Proof for the Queuing Formula: L = λW , 1961 .

[32]  Zhibin Jiang,et al.  A pull VPLs based release policy and dispatching rule for semiconductor wafer fabrication , 2012, 2012 IEEE International Conference on Automation Science and Engineering (CASE).

[33]  Lawrence M. Wein,et al.  Scheduling semiconductor wafer fabrication , 1988 .

[34]  John A. Buzacott,et al.  Stochastic models of manufacturing systems , 1993 .

[35]  Oliver Rose,et al.  CONLOAD—a new lot release rule for semiconductor wafer fabs , 1999, WSC '99.

[36]  Xiao Liu,et al.  A decentralised multi-objective scheduling methodology for semiconductor manufacturing , 2011 .

[37]  Zhibin Jiang,et al.  An optimised dynamic bottleneck dispatching policy for semiconductor wafer fabrication , 2009 .

[38]  T. A. J. Nicholson,et al.  A practical control system for optimizing production schedules , 1971 .