论文信息 - High-efficiency 5000 lines/mm multilayer-coated blazed grating for extreme ultraviolet wavelengths. - 字舞流文

High-efficiency 5000 lines/mm multilayer-coated blazed grating for extreme ultraviolet wavelengths.

D. L. Voronov | E. Anderson | T. Warwick | H. Padmore | V. Yashchuk | F. Salmassi | E. Gullikson | R. Heilmann | Minseung Ahn | M. Schattenburg | R. Cambie | Chih‐Hao Chang | L. Zipp | D. Voronov