Tomographic scanning microscope for 1 to 4-KeV xrays

X-ray microtomography enables three-dimensional imaging at sub-micron resolution with elemental and chemical state contrast. The 1 - 4 KeV energy region is promising for microtomography of biological, microelectronics, and materials sciences specimens. To capitalize on this potential, we are constructing a tomographic scanning x-ray microscope for 1 - 4 KeV x rays on a spherical grating monochromator beamline at the advanced photon source. The microscope, which uses zone plate optics, has an anticipated spatial resolution of 100 nm and an energy resolution of better than 1 eV.