Three-dimensional microfluidic channel with arbitrary length and configuration fabricated inside glass by femtosecond laser direct writing.

We demonstrate, for the first time to the best of our knowledge, fabrication of three-dimensional microfluidic channels with arbitrary lengths and configurations inside glass by femtosecond laser direct writing. The main fabrication process includes two steps: (1) direct formation of hollow microchannels in a porous glass substrate immersed in water by femtosecond laser ablation and (2) postannealing of the glass substrate at ∼1150°C by which the porous glass can be consolidated. We show that a square-wavelike channel with a total length of ∼1.4 cm and a diameter of ∼64 μm can be easily produced ∼250 μm beneath the glass surface.

[1]  S. Matsuo,et al.  Examination of Etching Agent and Etching Mechanism on Femotosecond Laser Microfabrication of Channels Inside Vitreous Silica Substrates , 2009 .

[2]  F. He,et al.  Direct fabrication of homogeneous microfluidic channels embedded in fused silica using a femtosecond laser. , 2010, Optics letters.

[3]  J. Nishii,et al.  Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses. , 2001, Optics letters.

[4]  G. Whitesides.  The origins and the future of microfluidics , 2006, Nature.

[5]  Koji Sugioka,et al.  Control of the cross-sectional shape of a hollow microchannel embedded in photostructurable glass by use of a femtosecond laser. , 2003, Optics letters.

[6]  P. Corkum,et al.  Fabrication of microchannels in glass using focused femtosecond laser radiation and selective chemical etching , 2006 .

[7]  D. Beebe,et al.  Three-dimensional micro-channel fabrication in polydimethylsiloxane (PDMS) elastomer , 2000, Journal of Microelectromechanical Systems.

[8]  T. Choi,et al.  Liquid-assisted femtosecond laser drilling of straight and three-dimensional microchannels in glass , 2004 .

[9]  K. Sugioka,et al.  Three-dimensional micromachining of glass using femtosecond laser for lab-on-a-chip device manufacture , 2005 .

[10]  Danping Chen,et al.  Colorless transparent fluorescence material: Sintered porous glass containing rare-earth and transition-metal ions , 2005 .

[11]  Koji Sugioka,et al.  Microfluidic laser embedded in glass by three-dimensional femtosecond laser microprocessing. , 2004, Optics letters.

[12]  R. Osellame,et al.  Shape control of microchannels fabricated in fused silica by femtosecond laser irradiation and chemical etching. , 2009, Optics express.

[13]  J. Nishii,et al.  Femtosecond laser-assisted three-dimensional microfabrication in silica. , 2001, Optics letters.

[14]  Shigeki Matsuo,et al.  Femtosecond laser-assisted etching of Pyrex glass with aqueous solution of KOH , 2009 .