Fluorescent dye based optical position sensing for planar linear motors

Industrial Sawyer motor technology has existed for nearly three decades, traditionally being operated as open-loop positioners. Such systems can attain micron level motion resolution and open-loop repeatability of 10 /spl mu/m. This paper outlines a optical sensing technique for Sawyer motors which is capable of sub-micron resolution. Such a sensor can easily be integrated into a motor enabling closed-loop control and sub-micron repeatability.

[1]  Ralph L. Hollis,et al.  3-DOF closed-loop control for planar linear motors , 1998, Proceedings. 1998 IEEE International Conference on Robotics and Automation (Cat. No.98CH36146).

[2]  Ralph L. Hollis,et al.  Magnetic and optical-fluorescence position sensing for planar linear motors , 1995, Proceedings 1995 IEEE/RSJ International Conference on Intelligent Robots and Systems. Human Robot Interaction and Cooperative Robots.

[3]  Zack J. Butler,et al.  Integrated precision 3-DOF position sensor for planar linear motors , 1998, Proceedings. 1998 IEEE International Conference on Robotics and Automation (Cat. No.98CH36146).

[4]  Kamal Youcef-Toumi,et al.  Modeling and design of a sensor for two dimensional linear motors , 1995, Proceedings of 1995 IEEE International Conference on Robotics and Automation.

[5]  E. Pelta.  Two-axis Sawyer motor for motion systems , 1987, IEEE Control Systems Magazine.

[6]  Jehuda Ish-Shalom.  Modeling of Sawyer planar sensor and motor dependence on planar yaw angle rotation , 1997, Proceedings of International Conference on Robotics and Automation.

[7]  Ralph L. Hollis,et al.  Agile assembly architecture: an agent based approach to modular precision assembly systems , 1997, Proceedings of International Conference on Robotics and Automation.