Low voltage electrostatic inchworm actuators in aqueous environments

Abstract A low-voltage, low-power electrostatic inchworm actuator integrated with a microneedle capable to operate in an aqueous environment is reported. The actuator provides ±50µm range, ±195µN output force, and 1.1µm average step size with only 11V operating voltage. Moreover, it consumes only dynamic power because of its electrostatic nature. This actuator is the state-of-the-art for low-voltage, low-power, large-range, and large-force applications to the best of our knowledge. A proper encapsulation is also achieved with a glass cap fabricated separately, and flip-chipped onto the actuator. Rendering the surfaces hydrophobic prevents the water ingress when the actuator operates in water.