论文信息 - Evaluation and fabrication of AFM array for ESA-Midas/Rosetta space mission - 字舞流文

Evaluation and fabrication of AFM array for ESA-Midas/Rosetta space mission

Teodor Gotszalk | Ivo W. Rangelow | Piotr Grabiec | B. E. Volland | Ivan Kostic | W. Barth | K. Torkar | P. Hudek | B. Volland | I. Rangelow | H. Heerlein | W. Barth | T. Debski | P. Grabiec | I. Kostic | P. Hudek | T. Gotszalk | T. Ivanov | N. Abedinov | K. Torkar | H. Heerlein | N. Abedinov | T. Dębski | Tz. Ivanov | K. Fritzenwallner | K. Studzińska | K. Fritzenwallner | K. Studzińska

[1] Ivo W. Rangelow,et al. Plasma etching for micromechanical sensor applications , 1994 .

[2] I. Rangelow,et al. Scanning probe sharp tip formation from IC integration using mesa technique , 1997 .

[3] Gotszalk,et al. Piezoresistive sensors for scanning probe microscopy , 2000, Ultramicroscopy.

[4] Ivo W. Rangelow,et al. Dry etching with gas chopping without rippled sidewalls , 1999 .

[5] I. Rangelow. Sharp silicon tips for AFM and field emission , 1994 .