Integrated charge and position sensing for feedback control of electrostatic MEMS

Closed-loop control of electrostatic MEMS requires sensing to provide a feedback signal. We present an integrated sensor for charge and position that negligibly affects the open-loop dynamics, does not increase the device footprint, and may be easily fabricated. Numerical finite-element simulation, incorporating a realistic electrostatic field model, and experimental results validate the functionality of the sensor. Simulations show how the sensor may be used in conjunction with nonlinear control to provide full gap operation and improved transient performance. Nonlinear control is often considered too complex for convenient implementation, however the controller presented may be implemented using on-chip, local, integrated circuit components.

[1]  J. Pelesko,et al.  Nonlocal problems in MEMS device control , 2001 .

[2]  A. Oja,et al.  Increasing the Dynamic Range of a Micromechanical Moving-Plate Capacitor , 2001 .

[3]  Kristofer S. J. Pister,et al.  Analysis of closed-loop control of parallel-plate electrostatic microgrippers , 1994, Proceedings of the 1994 IEEE International Conference on Robotics and Automation.

[4]  B. Boser,et al.  DYNAMICS AND CONTROL OF PARALLEL-PLATE ACTUATORS BEYOND THE ELECTROSTATIC INSTABILITY , 1999 .

[5]  R.W. Dutton,et al.  Electrostatic micromechanical actuator with extended range of travel , 2000, Journal of Microelectromechanical Systems.

[6]  D. H. S. Maithripala,et al.  Control of an Electrostatic MEMS Using Static and Dynamic Output Feedback , 2005 .

[7]  P.K.C. Wang.  FEEDBACK CONTROL OF VIBRATIONS IN A MICROMACHINED CANTILEVER BEAM WITH ELECTROSTATIC ACTUATORS , 1998 .

[8]  J. Seeger,et al.  Stabilization of electrostatically actuated mechanical devices , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[9]  A. Dehe,et al.  Current drive methods to extend the range of travel of electrostatic microactuators beyond the voltage pull-in point , 2002 .

[10]  Hiroyuki Fujita,et al.  A MEMS piggyback actuator for hard-disk drives , 2002 .

[11]  H. Nathanson,et al.  The resonant gate transistor , 1967 .

[12]  A. J. Peyton,et al.  Analog Electronics with Op-amps: A Source Book of Practical Circuits , 1993 .

[13]  Jordan M. Berg,et al.  Capacitive stabilization of an electrostatic actuator: output feedback viewpoint , 2003, Proceedings of the 2003 American Control Conference, 2003..

[14]  G. Kovacs.  Micromachined Transducers Sourcebook , 1998 .

[15]  F. Larnaudie,et al.  Analytical Simulation of a 1D Single Crystal Silicon Electrostatic Micromirror , 1999 .

[16]  John H. Comtois,et al.  Surface-micromachined polysilicon MOEMS for adaptive optics , 1999 .

[17]  J M Florence,et al.  Coherent optical correlator using a deformable mirror device spatial light modulator in the Fourier plane. , 1988, Applied optics.

[18]  Yong-Kweon Kim,et al.  Design and fabrication of 10×10 micro-spatial light modulator array for phase and amplitude modulation , 1999 .

[19]  John A. Pelesko,et al.  Mathematical Modeling of Electrostatic MEMS with Tailored Dielectric Properties , 2002, SIAM J. Appl. Math..

[20]  M. Horenstein,et al.  Differential capacitive position sensor for planar MEMS structures with vertical motion , 2000 .

[21]  David M. Bloom,et al.  Grating Light Valve: revolutionizing display technology , 1997, Electronic Imaging.

[22]  R. Stephenson.  A and V , 1962, The British journal of ophthalmology.

[23]  George G. Adams,et al.  A dynamic model, including contact bounce, of an electrostatically actuated microswitch , 2002 .

[24]  Bernhard E. Boser,et al.  Charge control of parallel-plate, electrostatic actuators and the tip-in instability , 2003 .

[25]  P. B. Chu,et al.  MEMS: the path to large optical crossconnects , 2002 .

[26]  G. Fedder,et al.  Position control of parallel-plate microactuators for probe-based data storage , 2004, Journal of Microelectromechanical Systems.

[27]  D. Castañón,et al.  Continuous-membrane surface-micromachined silicon deformable mirror , 1997 .

[28]  S. Senturia.  Microsystem Design , 2000 .

[29]  Jordan M. Berg,et al.  Control of an Electrostatic Microelectromechanical System Using Static and Dynamic Output Feedback , 2005 .

[30]  C. Mastrangelo,et al.  Application of sliding mode control to electrostatically actuated two-axis gimbaled micromirrors , 2003, Proceedings of the 2003 American Control Conference, 2003..

[31]  David Elata,et al.  Analytical approach and numerical /spl alpha/-lines method for pull-in hyper-surface extraction of electrostatic actuators with multiple uncoupled voltage sources , 2003 .