Fabrication of sharp knife-edged micro probe card combined with shadow mask deposition
暂无分享,去创建一个
Hiroyuki Fujita | Yamato Fukuta | Beomjoon Kim | H. Fujita | Younghak Cho | Y. Fukuta | Beomjoon Kim | Younghak Cho | Tony Kuki | T. Kuki
[1] H. Mimura,et al. Fabrication of Silicon Quantum Wires Using Separation by Implanted Oxygen Wafer , 1994 .
[2] M. Beiley,et al. A micromachined array probe card-fabrication process , 1995 .
[3] M. Beiley,et al. A micromachined array probe card-characterization , 1995 .
[4] Yongxia Zhang,et al. A new MEMS wafer probe card , 1997, Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots.
[5] Hiroyuki Fujita,et al. Fabrication of Silicon-Based Filiform-Necked Nanometric Oscillators , 2000 .
[6] Daisuke Saya,et al. Development of a Versatile Atomic Force Microscope within a Scanning Electron Microscope , 2000 .
[7] Jong-Hyun Lee,et al. Fabrication of Cantilever-Bump Type Si Probe Card , 2000 .
[8] Tadatomo Suga,et al. Characteristics of Low Force Contact Process for MEMS Probe Cards , 2002 .