论文信息 - Defect appearance on 4H-SiC homoepitaxial layers via molten KOH etching - 字舞流文

Defect appearance on 4H-SiC homoepitaxial layers via molten KOH etching

J. Chen | Yan Guoguo | Fuwang Zhang | Liangyong Wang | G. Sun | Y. Zeng | Youping He | L. Sang | Xinhou Liu | Y. Niu | Weiyao Zhao | Min Guan | Shen Zhanwei | Wen Zhengxin