论文信息 - Micromachined PMN-PT single crystal composite transducers -- 15–75 MHz PC-MUT

Micromachined PMN-PT single crystal composite transducers -- 15–75 MHz PC-MUT

In this paper a piezoelectric composite based micromachined ultrasound transducer (PC-MUT) technology is presented for fabrication of PMN-PT single crystal piezoelectric composite transducers. Micromachined PMN-PT single crystal 1-3 composites with resonance frequencies of 15 MHz-75 MHz were fabricated and characterized with coupling coefficient of 0.67-0.79. Transducers with a frequency of 75 MHz were prototyped and characterized.

[1] K. Shung,et al. A 30-MHz piezo-composite ultrasound array for medical imaging applications , 2002, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[2] G. Reig,et al. Application Considerations in Specifying High Frequency Ultrasonic Transducers , 2022 .

[3] X. Geng,et al. 5I-1 Microfabrication of Piezoelectric Composite Ultrasound Transducers (PC-MUT) , 2006, 2006 IEEE Ultrasonics Symposium.

[4] Xiaoning Jiang,et al. PC-MUT Arrays for Ophthalmologic Ultrasound , 2007 .

[5] Xiaoning Jiang,et al. High Frequency Piezo Composites Microfabricated Ultrasound Transducers for Intravascular Imaging , 2006 .

[6] X. Geng,et al. 4F-5 PC-MUT Arrays for Ophthalmologic Ultrasound , 2007, 2007 IEEE Ultrasonics Symposium Proceedings.

[7] F. S. Foster,et al. Beyond 30 MHz [applications of high-frequency ultrasound imaging] , 1996 .

[8] Pei-Jie Cao,et al. 5C-5 High Frequency Piezo Composites Microfabricated Ultrasound Transducers for Intravascular Imaging (Invited) , 2006, 2006 IEEE Ultrasonics Symposium.