Hybrid integration of surface-emitting microlaser chip and planar optics substrate for interconnection applications

The bonding of a monolithic array of surface-emitting microlasers onto a glass substrate that contains a matching array of microlenses and mirrors is reported. The bonding was achieved by flip-chip solder bump bonding using indium as the solder material. The alignment precision is within +or-2 mu m. The optical substrate provides a simple interconnection scheme that routes the light from each laser to well defined output positions. >

[1]  B. Tell,et al.  Characteristics of top-surface-emitting GaAs quantum-well lasers , 1990, IEEE Photonics Technology Letters.

[2]  M. Q. Kearly,et al.  Optoelectronic component arrays for optical interconnection of circuits and subsystems , 1991 .

[3]  H Ogawa,et al.  Diffraction-limited blazed reflection diffractive microlenses for oblique incidence fabricated by electron-beam lithography. , 1991, Applied optics.

[4]  Monolithic integration of GaInAsP/InP carrier depletion directional couplers and GaInAs p-i-n detectors on semi-insulating InP , 1992, IEEE Photonics Technology Letters.

[5]  A Huang,et al.  Planar integration of free-space optical components. , 1989, Applied optics.

[6]  J Jahns,et al.  Optical interconnects using top-surface-emitting microlasers and planar optics. , 1992, Applied optics.

[7]  J Jahns,et al.  Precise alignment through thick wafers using an optical copying techniquev. , 1992, Optics letters.

[8]  Leo M. F. Chirovsky,et al.  Uniform 64*1 arrays of individually-addressed vertical cavity top surface emitting lasers , 1991 .

[9]  F. Koyama,et al.  Microcavity GalaAs/GaAs surface-emitting laser with Ith = 6 mA , 1987 .

[10]  J. P. Harbison,et al.  Low threshold electrically pumped vertical cavity surface emitting microlasers , 1989, Annual Meeting Optical Society of America.

[11]  S. Sasaki,et al.  3-D electromagnetic field analysis of interconnections in copper-polyimide multichip modules , 1991 .

[12]  L.A. D'Asaro,et al.  A 2 kbit array of symmetric self-electrooptic effect devices , 1990, IEEE Photonics Technology Letters.

[13]  J Jahns,et al.  Two-dimensional array of diffractive microlenses fabricated by thin film deposition. , 1990, Applied optics.

[14]  F.J. Leonberger,et al.  Optical interconnections for VLSI systems , 1984, Proceedings of the IEEE.