Paradigm Phase Shift: RF MEMS Phase Shifters: An Overview

Microelectromechanical systems (MEMS) have been familiar in the field of microelectronics and device technology since 1965, when Harvey C. Nathanson invented the first MEMS device (known as the resonant gate transistor). Since that time, MEMS have represented a prominent field for academic research, with simplified implementations of several devices such as sensors, transducers, actuators, and accelerometers being fabricated. According to MEMS technology, all devices could be fabricated using standard integrated circuit (IC) techniques, with the device?s lateral dimensions normally ranging from a maximum of 500 nm to submicron ranges.

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