Design of Energy-Saving Piezoelectric Actuator Drive for High Frequency Servo Valve

The paper presents a circuit topology favorable to drive piezoelectric actuators for high frequency servo valve. It begins with a short overview of different energy-saving PZA drive types and their tradeoff between efficiency and circuit complexity. Then the mechanical structure and equivalent model of the piezoelectric servo valve are described. And the circuit topology including an energy-saving oscillator, an efficient DC bias power and a repetitive controller especially for tracking reciprocating motion, is proposed. The efficiency-improved PZA drive is then derived from the above design. Finally, the drive together with the servo valve is tested in the simulation experiments.