DESIGN OF A 3 DOF DISPLACEMENT STAGE BASED ON FERROFLUIDS

This paper presents the design of a 3 DOF (Degrees Of Freedom) displacement stage. This stage is composed of a mobile platform in suspension on three ferrofluid bubbles as an hydrostatic suspension. Bubbles stay attached to the platform thanks to three permanent magnets fixed on this platform. The actuation is obtained by fixing and controlling three coils on the support near the magnets. The dynamical characteristics of the stage are tuning by choosing appropriate volumes and properties for the ferrofluid and permanent magnets. The control in open loop permits a resolution of 50 nm but unfortunately a lower repeatability. The stage will be improved in the future by using a position feedback control.