Pumping of water solutions in microfabricated electrohydrodynamic systems

A microfabricated electrohydrodynamic pump without moving parts driven by low voltages with high-frequency traveling waves is presented. Micron-size scale systems without moving parts fabricated in planar silicon technology are presented and quantitatively described. The operating principle to pump water and weak electrolyte solutions is outlined. It is shown that conductive liquids such as water solutions can be pumped opposite to the direction of the traveling wave. Typical parameters characterizing the advantages and limitations of the pumping principle are discussed. Opportunities for optimization of the micropump in terms of further miniaturization and an increased number of electrodes are noted.<<ETX>>

[1]  Masayoshi Esashi,et al.  Normally closed microvalve and mircopump fabricated on a silicon wafer , 1989 .

[2]  H. Sandmaier,et al.  An electrohydrodynamic micropump , 1990, IEEE Proceedings on Micro Electro Mechanical Systems, An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots..

[3]  J. R. Melcher,et al.  Electrohydrodynamics: A Review of the Role of Interfacial Shear Stresses , 1969 .

[4]  Masayoshi Esashi,et al.  Normally close microvalve and micropump fabricated on a silicon wafer , 1989, IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'.

[5]  Shigeru Nakagawa,et al.  Micropump and sample-injector for integrated chemical analyzing systems , 1990 .

[6]  Stephen F. Bart,et al.  Microfabricated electrohydrodynamic pumps , 1990 .

[7]  J. R. Melcher,et al.  CONTINUUM ELECTROMECHANICS GROUP: TRAVELING WAVE BULK ELECTROCONVECTION INDUCED ACROSS A TEMPERATURE GRADIENT. , 1967 .

[8]  J. Fluitman,et al.  A thermopneumatic micropump based on micro-engineering techniques , 1990 .