论文信息 - Atomic layer deposition of diisopropylaminosilane on WO3(001) and W(110): a density functional theory study. - 字舞流文

Atomic layer deposition of diisopropylaminosilane on WO3(001) and W(110): a density functional theory study.

Y. Shim | Seongsu Lee | H. Lee | Jinseong Kim | Woojin Lee | Jaikwang Shin | Kyungtae Lee | Jie-Won Park | Samjong Choi | S. Kim