Monolithically cascaded micromirror pair driven by angular vertical combs for two-axis scanning

In this work, monolithically cascaded one-axis micromirrors driven by angular vertical comb drives are designed and fabricated. Using W-shaped folded-beam optics, we demonstrate two-axis scanning covering /spl plusmn/6.0/spl deg/ two-dimensional area at resonant modes of 7.5 kHz, /spl plusmn/17 V for a fast-scanning mirror and 1.2 kHz, /spl plusmn/7 V for a slow-scanning mirror. The experimental results satisfy the requirements for a surveying instrument.

[1]  V. Milanovic,et al.  A high aspect ratio 2D gimbaled microscanner with large static rotation , 2002, IEEE/LEOS International Conference on Optical MEMs.

[2]  Ru-Min Chao,et al.  A NOVEL MEMS TUNABLE CAPACITOR BASED ON ANGULAR VERTICAL COMB DRIVE ACTUATORS , 2002 .

[3]  M. Wu,et al.  A scanning micromirror with angular comb drive actuation , 2002, Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266).

[4]  Ming C. Wu,et al.  A 2D Scanner by Surface and Bulk Micromachined Angular Vertical Comb Actuators , 2003 .

[5]  M. Wu,et al.  Angular vertical comb-driven tunable capacitor with high-tuning capabilities , 2004, Journal of Microelectromechanical Systems.

[6]  G S Kino,et al.  Micromachined scanning confocal optical microscope. , 1996, Optics letters.

[7]  S. Ueda,et al.  A 2-axis comb-driven micromirror array for 3D MEMS switches , 2002, IEEE/LEOS International Conference on Optical MEMs.

[8]  C. Chang-Hasnain,et al.  Actuated polysilicon micromirrors for raster-scanning displays , 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

[9]  Hiroshi Toshiyoshi,et al.  A surface and bulk micromachined angular vertical combdrive for scanning micromirrors , 2003, OFC 2003 Optical Fiber Communications Conference, 2003..

[10]  Hiroshi Toshiyoshi,et al.  Design of electrostatic actuators for MOEMS applications , 2002, Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS.

[11]  M.C. Wu,et al.  Device transplant of optical MEMS for out of plane beam steering , 2001, Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090).

[12]  Kam Y. Lau,et al.  A FLAT HIGH-FREQUENCY SCANNING MICROMIRROR , 2000 .

[13]  D. Kunze,et al.  Large deflection micromechanical scanning mirrors for linear scans and pattern generation , 2000, IEEE Journal of Selected Topics in Quantum Electronics.

[14]  Rijk Schuetz,et al.  Electrostatically driven micromirrors for a miniaturized confocal laser scanning microscope , 1999, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.