Research of Temperature Compensation on High Accuracy Pressure Sensors

The temperature characteristics of semiconductor will make zero and sensitivity of pressure sensor drift with temperature.It is the main factor that causes measurement error of pressure sensor.For high precision pressure detection systems,especially in applications that temperature changes greatly,temperature drift has become a major obstacle to improve their system performance.This paper analyzes the advantages and disadvantages of a variety of temperature compensation methods,and proposes one that combines curve fitting and cubic spline interpolation.This method can improve the system performance.