论文信息 - Design of the all-silicon long-wavelength infrared achromatic metalens based on deep silicon etching. - 字舞流文

Design of the all-silicon long-wavelength infrared achromatic metalens based on deep silicon etching.

H. Liu | N. Xu | Dongzhi Shan | Q. Sun | Naitao Song | Yi Zhao | Yangshan Tang | Yansong Wang | Xin Chen | Jin-song Gao | Xiao-guo Feng