CMOS MMICs for microwave and millimeter wave applications

Recent results on MMIC based on a 90-nm CMOS process are presented. Linear and nonlinear models were developed for the transistors based on S-parameters, noise parameters, and power spectrum measurements. Based on EM-simulations, models for multilayer capacitances, MIM-capacitances, various transmission lines etc were also developed. Amplifiers, frequency mixers, and frequency multipliers were then designed, fabricated and characterized. Amplifiers with a gain of 6 and 3.5 dB per stage at 20 and 40 GHz respectively, were demonstrated as well as frequency multipliers from 20 to 40 GHz with 15.8 dB conversion loss, and 30 to 60 GHz multipliers with 15.3 dB conversion loss. Resistive mixers at 20, 40, and 60 GHz were also demonstrated with promising results.

[1]  I. Angelov,et al.  Extensions of the Chalmers nonlinear HEMT and MESFET model , 1996 .

[2]  M. Tiebout,et al.  A 1 V 51GHz fully-integrated VCO in 0.12 /spl mu/m CMOS , 2002, 2002 IEEE International Solid-State Circuits Conference. Digest of Technical Papers (Cat. No.02CH37315).

[3]  H. Zirath,et al.  Resistive SiC-MESFET mixer , 2002, IEEE Microwave and Wireless Components Letters.

[4]  K. Stein,et al.  A high reliability metal insulator metal capacitor for 0.18 /spl mu/m copper technology , 2000, International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138).

[5]  E. Bergeault,et al.  RF mixers using standard digital CMOS 0.35 /spl mu/m process , 2001, 2001 IEEE MTT-S International Microwave Sympsoium Digest (Cat. No.01CH37157).

[6]  A. Tessmann,et al.  LMDS up- and down-converter MMIC , 2000, 2000 IEEE MTT-S International Microwave Symposium Digest (Cat. No.00CH37017).

[7]  Jenshan Lin,et al.  A CMOS resistive ring mixer MMICs for GSM 900 and DCS 1800 base station applications , 2000, 2000 IEEE MTT-S International Microwave Symposium Digest (Cat. No.00CH37017).

[8]  Christian Fager,et al.  High output power, broadband 28-56 GHz MMIC frequency doubler , 2000, 2000 IEEE MTT-S International Microwave Symposium Digest (Cat. No.00CH37017).

[9]  L.M. Devlin,et al.  A monolithic, 2 to 18 GHz upconverter , 2002, 2002 IEEE MTT-S International Microwave Symposium Digest (Cat. No.02CH37278).

[10]  M. Liang,et al.  A full Cu damascene metallization process for sub-0.18 /spl mu/m RF CMOS SoC high Q inductor and MIM capacitor application at 2.4 GHz and 5.3 GHz , 2001, Proceedings of the IEEE 2001 International Interconnect Technology Conference (Cat. No.01EX461).

[11]  M. Wurzer,et al.  A 45 GHz SiGe active frequency multiplier , 2002, 2002 IEEE International Solid-State Circuits Conference. Digest of Technical Papers (Cat. No.02CH37315).

[12]  Xiang Guan,et al.  A 24-GHz CMOS front-end , 2004, IEEE Journal of Solid-State Circuits.

[13]  T. Tokumitsu,et al.  A 60 GHz millimeter-wave MMIC chipset for broadband wireless access system front-end , 2002, 2002 IEEE MTT-S International Microwave Symposium Digest (Cat. No.02CH37278).

[14]  U. Lott,et al.  A zero DC-power low-distortion mixer for wireless applications , 1999, IEEE Microwave and Guided Wave Letters.

[15]  Yahia M. M. Antar,et al.  A novel common-gate mixer for wireless applications , 2002 .

[16]  Franco Giannini,et al.  MIM capacitor modeling: a planar approach , 1995 .

[17]  F. Ellinger,et al.  Compact monolithic integrated resistive mixers with low distortion for HIPERLAN , 2002 .

[18]  K. Chew,et al.  Characterization and comparison of PECVD silicon nitride and silicon oxynitride dielectric for MIM capacitors , 2003, IEEE Electron Device Letters.

[19]  S. Chu,et al.  Effect of the nitrous oxide plasma treatment on the MIM capacitor , 2002, IEEE Electron Device Letters.

[20]  H. Zirath Development of 60 GHz front end circuits for high data rate communication systems in Sweden and Europe , 2003, 25th Annual Technical Digest 2003. IEEE Gallium Arsenide Integrated Circuit (GaAs IC) Symposium, 2003..