论文信息 - Pressure sensitivity in anisotropically etched thin-diaphragm pressure sensors

Pressure sensitivity in anisotropically etched thin-diaphragm pressure sensors

In this paper the differential equations governing thin, square-diaphragm silicon pressure sensors are developed and solved using finite-difference numerical methods. Diaphragm deflection and stress patterns are presented in a normalized form applicable to diaphragms of arbitrary thickness and size. For 1-mm210-µm-thick diaphragms in

K. Wise | S. K. Clark | Kensall D. Wise | S. K. Clark

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