论文信息 - Design and optimization of a 3-DOF planar MEMS stage with integrated thermal position sensors

Design and optimization of a 3-DOF planar MEMS stage with integrated thermal position sensors

This work presents the design and optimization of a large stroke planar positioning stage in a single-mask MEMS fabrication process. Electrostatic comb-drive actuators were used to control the position and rotation of the 3-DOF stage. Thermal displacement sensors are integrated to provide feedback. Simulations show that we are able to reach a +/-120mm range of motion and +/-30 degrees of rotation. Preliminary measurements were performed which validated our models.

Dannis Michel Brouwer | Justus Laurens Herder | B. Krijnen | Koen R. Swinkels

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