Interfacial polarisation in Al-Y/sub 2/O/sub 3/-SiO/sub 2/-Si capacitor

The variation by a factor of 2 in the observed permittivity of yttrium oxide film is explained in terms of interfacial polarisation based on the Y2O3/SiO2 double-layer model. Provided the dielectric relaxation time constants of the two layers are grossly dissimilar, the model can also explain the frequency independence of the composite capacitor.