论文信息 - Direct ion beam deposition of hard (>30 GPa) diamond-like films from RF inductively coupled plasma source - 字舞流文

Direct ion beam deposition of hard (>30 GPa) diamond-like films from RF inductively coupled plasma source

V. Novotny | J. Hoehn | B. Druz | A. Rukovishnikov | J. W. Hoehn | V. Polyakov | I. Zaritskiy