Electro‐optic amplitude modulation using three‐dimensional LiNbO3 waveguide fabricated by TiO2 diffusion

An almost single‐mode waveguiding layer has been fabricated by thermal diffusion of TiO2 into LiNbO3. The refractive‐index change in the layer is 2–3×10−3 for both ne and no, and the propagation loss is 0.7–0.8 dB/cm. The electro‐optic coefficients are found to be nearly equal to those of the bulk crystal. An amplitude modulation has been made with a stripe waveguide 10 μm wide and planar electrodes. The half‐wave voltage is 17 V and the maximum extinction ratio is 12 dB.