Transient stress characterization of AlGaN/GaN HEMTs due to electrical and thermal effects

Abstract In this paper, we present finite element simulation results of the transient stress response of an AlGaN/GaN high electron mobility transistor (HEMT). The modeling technique involves a small-scale electro-thermal model coupled to a large-scale mechanics model to determine the resulting stress distribution within a device operated under radio frequency (RF) conditions. The electrical characteristics of the modeled device were compared to experimental measurements and existing simulation data from literature for validation. The results show critical regions around the gate Schottky contact undergo drastically different transient stresses during pulsed operation. Specifically, stress profiles within the AlGaN layer around the gate foot print (GFP) undergo highly tensile electro-thermal stresses while stresses within the AlGaN outside the gate connected field plate (GCFP) towards the drain contact undergo highly tensile electrical stress and compressive thermoelastic stress. It is shown AlGaN/GaN HEMTs undergo large amounts of cyclic loading during typical transient operation. Based on these findings, transient failure mechanisms may differ from those previously studied under DC operation due to large amount of cyclic loading of a device around the gate structure.

[1]  E. Kohn,et al.  Transient thermal characterization of AlGaN/GaN HEMTs grown on silicon , 2005, IEEE Transactions on Electron Devices.

[2]  H. Morkoc,et al.  Thermal Properties of AlGaN/GaN HFETs on Bulk GaN Substrates , 2012, IEEE Electron Device Letters.

[3]  Sven Einfeldt,et al.  Temperature dependence of the thermal expansion of GaN , 2005 .

[4]  Seong-Yong Park,et al.  TEM Observation of Crack- and Pit-Shaped Defects in Electrically Degraded GaN HEMTs , 2008, IEEE Electron Device Letters.

[5]  E. A. Burgemeister,et al.  Thermal conductivity and electrical properties of 6H silicon carbide , 1979 .

[6]  R. Dimitrov,et al.  Two dimensional electron gases induced by spontaneous and piezoelectric polarization in undoped and doped AlGaN/GaN heterostructures , 2000 .

[7]  R. Bradt,et al.  Thermal expansion of the hexagonal (6H) polytype of silicon carbide , 1986 .

[8]  T. F. Retajczyk,et al.  Elastic stiffness and thermal expansion coefficients of various refractory silicides and silicon nitride films , 1980 .

[9]  Izabella Grzegory,et al.  Elastic constants of gallium nitride , 1996 .

[10]  Residual strain dependence of optical characteristics in GaN layers grown on (0001) sapphire substrates , 1999 .

[11]  Feng Gao,et al.  A model for the critical voltage for electrical degradation of GaN high electron mobility transistors , 2009, 2009 Reliability of Compound Semiconductors Digest (ROCS).

[12]  W. James,et al.  Electro-thermo-mechanical modeling of GaN-based HFETs and MOSHFETs , 2011 .

[13]  Martin Kuball,et al.  Measurement of temperature distribution in multifinger AlGaN/GaN heterostructure field-effect transistors using micro-Raman spectroscopy , 2003 .

[14]  G. Verzellesi,et al.  Reliability of GaN High-Electron-Mobility Transistors: State of the Art and Perspectives , 2008, IEEE Transactions on Device and Materials Reliability.

[15]  J. D. del Alamo,et al.  Critical Voltage for Electrical Degradation of GaN High-Electron Mobility Transistors , 2008, IEEE Electron Device Letters.

[16]  Sukwon Choi,et al.  The Impact of Bias Conditions on Self-Heating in AlGaN/GaN HEMTs , 2013, IEEE Transactions on Electron Devices.

[17]  E. Bourhis,et al.  Measurement of thin film elastic constants by X-ray diffraction , 2004 .

[18]  Martin Kuball,et al.  Benchmarking of Thermal Boundary Resistance in AlGaN/GaN HEMTs on SiC Substrates: Implications of the Nucleation Layer Microstructure , 2010, IEEE Electron Device Letters.

[19]  Mario G. Ancona,et al.  Fully coupled thermoelectromechanical analysis of GaN high electron mobility transistor degradation , 2012 .

[20]  Jungwoo Joh,et al.  GaN HEMT reliability , 2009, Microelectron. Reliab..

[21]  E. Weber,et al.  Elastic moduli of gallium nitride , 1997 .

[22]  S. Thompson,et al.  Uniaxial-process-induced strained-Si: extending the CMOS roadmap , 2006, IEEE Transactions on Electron Devices.

[23]  T. Martin,et al.  Thermal Properties and Reliability of GaN Microelectronics: Sub-Micron Spatial and Nanosecond Time Resolution Thermography , 2007, 2007 IEEE Compound Semiconductor Integrated Circuits Symposium.

[24]  R. Vetury,et al.  A Robust AlGaN/GaN HEMT Technology for RF Switching Applications , 2011, 2011 IEEE Compound Semiconductor Integrated Circuit Symposium (CSICS).

[25]  R. Zhang,et al.  Investigation on thermo-mechanical responses in high power multi-finger AlGaN/GaN HEMTs , 2014, Microelectronics and reliability.

[26]  Samuel Graham,et al.  The impact of mechanical stress on the degradation of AlGaN/GaN high electron mobility transistors , 2013 .

[27]  Bing Deng,et al.  Two-dimensional transient simulations of the self-heating effects in GaN-based HEMTs , 2013, Microelectron. Reliab..

[28]  David A. Green,et al.  Performance, Reliability, and Manufacturability of AlGaN/GaN High Electron Mobility Transistors on Silicon Carbide Substrates , 2006 .

[29]  J. Narayan,et al.  Raman studies of GaN/sapphire thin film heterostructures , 2009 .

[30]  A. Christensen Multiscale modeling of thermal transport in gallium nitride microelectronics , 2009 .

[31]  Electro-thermo-mechanical transient modeling of stress development in AlGaN/GaN high electron mobility transistors (HEMTs) , 2014, Fourteenth Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (ITherm).

[32]  H.A. Hung,et al.  Thermal resistance calculation of AlGaN-GaN devices , 2004, IEEE Transactions on Microwave Theory and Techniques.

[33]  J. Palmour,et al.  SiC and GaN Wide Bandgap Device Technology Overview , 2007, 2007 IEEE Radar Conference.

[34]  D. Green,et al.  Development of a Versatile Physics-Based Finite-Element Model of an AlGaN/GaN HEMT Capable of Accommodating Process and Epitaxy Variations and Calibrated Using Multiple DC Parameters , 2011, IEEE Transactions on Electron Devices.

[35]  Cheul‐Ro Lee,et al.  Evolution of stress relaxation and yellow luminescence in GaN/sapphire by Si incorporation , 1997 .

[36]  J. D. del Alamo,et al.  Mechanisms for Electrical Degradation of GaN High-Electron Mobility Transistors , 2006, 2006 International Electron Devices Meeting.

[37]  Joy Laskar,et al.  Study of self-heating effects, temperature-dependent modeling, and pulsed load-pull measurements on GaN HEMTs , 2001 .

[38]  Eric R. Heller,et al.  Electrical and structural dependence of operating temperature of AlGaN/GaN HEMTs , 2013, Microelectron. Reliab..

[39]  Hangfeng Ji,et al.  Integrated micro-Raman/infrared thermography probe for monitoring of self-heating in AlGaN/GaN transistor structures , 2006, IEEE Transactions on Electron Devices.

[40]  R. Vetury,et al.  Thermometry of AlGaN/GaN HEMTs Using Multispectral Raman Features , 2013, IEEE Transactions on Electron Devices.

[41]  Non-uniform stress effects in GaN based heterojunction field effect transistors , 2005, IEEE Compound Semiconductor Integrated Circuit Symposium, 2005. CSIC '05..

[42]  A. Crespo,et al.  Electro-thermal modeling of multifinger AlGaN/GaN HEMT device operation including thermal substrate effects , 2008, Microelectron. Reliab..

[43]  Mark Bush,et al.  Effects of deposition temperature on the mechanical and physical properties of silicon nitride thin films , 2005 .