Dimensional micro and nano metrology

The need for dimensional micro and nano metrology is evident, and as critical dimensions are scaled down and geometrical complexity of objects is increased, the available technologies appear not sufficient. Major research and development efforts have to be undertaken in order to answer these challenges. The developments have to include new measuring principles and instrumentation, tolerancing rules and procedures as well as traceability and calibration. The current paper describes issues and challenges in dimensional micro and nano metrology by reviewing typical measurement tasks and available instrumentation. Traceability and calibration issues are discussed subsequently. Finally needs and gaps are identified based on these observations.

[1]  G N Peggs,et al.  A review of recent work in sub-nanometre displacement measurement using optical and X–ray interferometry , 2002, Philosophical Transactions of the Royal Society of London. Series A: Mathematical, Physical and Engineering Sciences.

[2]  H. N. Hansen,et al.  Wear of micro end mills , 2005 .

[3]  Ekkard Brinksmeier,et al.  Machining of Precision Parts and Microstructures , 2002 .

[4]  D. Lucca,et al.  Surfaces in Precision Engineering, Microengineering and Nanotechnology , 2003 .

[5]  H Han Haitjema,et al.  Development of a Silicon-based Nanoprobe System for 3-D Measurements , 2001 .

[6]  Sang-Gook Kim,et al.  Design of a Microactuator Array Against the Coupled Nature of Microelectromechanical Systems (MEMS) Processes , 2000 .

[7]  Robert J. Hocken,et al.  Optical Metrology of Surfaces , 2005 .

[8]  Sang-Gook Kim,et al.  Design of Micro-photonic Beam Steering Systems , 2002 .

[9]  Wolfgang Osten,et al.  Ein Messsystem zur Bestimmung von Materialkennwerten an Mikrokomponenten auf Basis der Digitalen Holografie (A Measurement System for the Determination of Material Properties of Microcomponents on the Basis of Digital Holography) , 2001 .

[10]  J. L. Hall,et al.  Real-time precision refractometry: new approaches. , 1997, Applied optics.

[12]  Gwo-Sheng Peng,et al.  Correction of nonlinearity in one-frequency optical interferometry , 1996 .

[13]  Sjag Suzanne Cosijns,et al.  Displacement laser interferometry with sub-nanometer uncertainty , 2004 .

[14]  G. B. nsch,et al.  Measurement of the refractive index of air and comparison with modified Edl?n's formulae , 1998 .

[15]  Giuliano Bissacco,et al.  Precision manufacturing methods of inserts for injection molding of microfluidic systems. , 2005 .

[16]  H Han Haitjema.  International comparison of depth-setting standards , 1997 .

[17]  L. Howard,et al.  Real-time displacement measurements with a Fabry-Perot cavity and a diode laser , 2001 .

[18]  J. Frech,et al.  Decoupled microgyros and the design principle DAVED , 2001, Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090).

[19]  Alan E. Rosenbluth,et al.  Optical sources of non-linearity in heterodyne interferometers , 1990 .

[20]  F. Meli,et al.  Ultraprecision micro-CMM using a low force 3D touch probe , 2005, SPIE Optics + Photonics.

[21]  Konrad Herrmann,et al.  A laser measurement system for the high-precision calibration of displacement transducers , 1996 .

[22]  Eric Lebrasseur,et al.  A new characterization tool for vertical profile measurement of high-aspect-ratio microstructures , 2002 .

[23]  Peter Goodhew,et al.  Electron Microscopy And Analysis , 1975 .

[24]  H Han Haitjema,et al.  Calibration of displacement sensors up to 300 µm with nanometre accuracy and direct traceability to a primary standard of length , 2000 .

[25]  S. Senturia.  Microsystem Design , 2000 .

[26]  Wenmei Hou,et al.  Drift of nonlinearity in the heterodyne interferometer , 1994 .

[27]  H Han Haitjema,et al.  Design and calibration of a parallel-moving displacement generator for nano-metrology , 1998 .

[28]  Fumihito Arai,et al.  3D nanoassembly of carbon nanotubes through nanorobotic manipulations , 2002, Proceedings 2002 IEEE International Conference on Robotics and Automation (Cat. No.02CH37292).

[29]  Sfcl Serge Wetzels.  Laser based displacement calibration with nanometre accuracy , 1998 .

[30]  Bharat Bhushan.  Springer Handbook of Nanotechnology , 2007 .

[31]  John A. Kramar,et al.  Nanometre resolution metrology with the Molecular Measuring Machine , 2005 .

[32]  Lowell P. Howard,et al.  A simple technique for observing periodic nonlinearities in Michelson interferometers , 1998 .

[33]  P. A. McKeown,et al.  Nanotechnology: International Developments and Emerging Products , 2000 .

[34]  G. Piazzesi.  Photogrammetry with the scanning electron microscope , 1973 .

[35]  L. P. I︠A︡roslavskiĭ,et al.  Methods of Digital Holography , 1980 .

[36]  K. P. Birch,et al.  LETTER TO THE EDITOR: Correction to the Updated Edln Equation for the Refractive Index of Air , 1994 .

[37]  Phj Piet Schellekens,et al.  An elastically guided machine axis with nanometer repeatability , 2005 .

[38]  Michael A. Player,et al.  Importance of rotational beam alignment in the generation of second harmonic errors in laser heterodyne interferometry , 1993 .

[39]  Thorsten Dziomba,et al.  Standards for the Calibration of Instruments for Dimensional Nanometrology , 2006 .

[40]  A Weckenmann,et al.  Traceable profilometry with a 3D nanopositioning unit and zero indicating sensors in compensation method , 2005 .

[41]  Mjm Marcel Renkens,et al.  An accurate interference refractometer based on a permanent vacuum chamber : development and results , 1993 .

[42]  Yoon-Joon Choi,et al.  Micromachined Thin-Film Mirror Array for Reflective Light Modulation , 1997 .

[43]  J. Villarrubia,et al.  Advanced electron microscopy needs for nanotechnology and nanomanufacturing , 2005 .

[44]  P. Rai-Choudhury.  Handbook of Microlithography, Micromachining, and Microfabrication. Volume 1: Microlithography , 1997 .

[45]  N Bobroff.  Residual errors in laser interferometry from air turbulence and nonlinearity. , 1987, Applied optics.

[46]  Takahisa Masuzawa,et al.  Twin-Probe Vibroscanning Method for Dimensional Measurement of Microholes , 1997 .

[47]  H Han Haitjema,et al.  Modeling and verifying non-linearities in heterodyne displacement interferometry , 2002 .

[48]  Nam-Trung Nguyen,et al.  Fabrication of micropumps with Q-switched Nd:YAG-lasers , 2002, International Symposium on Laser Precision Microfabrication.

[49]  E. Westkämper,et al.  An Approach to the Development of Tolerance Systems for Micro‐ and Nanotechnology , 2006 .

[50]  Takahisa Masuzawa,et al.  State of the Art of Micromachining , 2000 .

[51]  Kiyoshi Takamasu,et al.  EVALUATION OF PROPERTIES OF NANO-CMM BY THERMAL DRIFT AND TILT ANGLE , 2003 .

[52]  Calibration of standards for precision pitch measurement in the nanometre region by combined scanning tunnelling microscopy and x-ray interferometry , 1999 .

[53]  Alan Boyde,et al.  Quantitative photogrammetric analysis and qualitative stereoscopic analysis of SEM images , 1973 .

[54]  Phj Piet Schellekens,et al.  Measurements of the Refractive Index of Air Using Interference Refractometers , 1983 .

[55]  J. Helmcke,et al.  Realization of the metre by frequency-stabilized lasers , 2003 .

[56]  J. Garnaes,et al.  Profiles of a high-aspect-ratio grating determined by spectroscopic scatterometry and atomic-force microscopy. , 2006, Applied optics.

[57]  Bian Zhi-xin,et al.  Analyzing the Lithography Part of the International Technology Roadmap for Semiconductors (2005 Edition) , 2006 .

[58]  U. Schnars,et al.  Direct recording of holograms by a CCD target and numerical reconstruction. , 1994, Applied optics.

[59]  Chien-ming Wu.  Periodic nonlinearity resulting from ghost reflections in heterodyne interferometry , 2003 .

[60]  Dominiek Reynaerts,et al.  Assembly of Microsystems , 2000 .

[61]  M. Hemmleb,et al.  Determination of the height of a microstructure sample by a SEM with a conventional and a digital photogrammetric method , 1996 .

[62]  WO Wouter Pril,et al.  Development of high precision mechanical probes for coordinate measuring machines , 2002 .

[63]  Ludger Koenders,et al.  From nanometre to millimetre: a feasibility study of the combination of scanning probe microscopy and combined optical and x-ray interferometry , 2003 .

[64]  Andrew Lewis,et al.  Design for a compact high-accuracy CMM , 1999 .

[65]  Phj Piet Schellekens,et al.  Development of a Traceable Laser-Based Displacement Calibration System with Nanometer Accuracy , 1997 .

[66]  Michael A. Player,et al.  Polarization Effects in Heterodyne Interferometry , 1995 .

[67]  Ulrike Wallrabe,et al.  Power characteristics of 3-D operated microturbines for minimally invasive therapy , 1996, Proceedings of Ninth International Workshop on Micro Electromechanical Systems.

[68]  J. M. D. Freitas,et al.  Analysis of laser source birefringence and dichroism on nonlinearity in heterodyne interferometry , 1997 .

[69]  C M Sutton.  Non-linearity in length measurement using heterodyne laser Michelson interferometry , 1987 .

[70]  Masaji Sawabe,et al.  A new vacuum interferometric comparator for calibrating the fine linear encoders and scales , 2004 .

[71]  Hendrik Rothe,et al.  Coordinate Measurements in Microsystems by Using AFM‐Probing: Problems and Solutions , 2006 .

[72]  P. Ciddor.  Refractive index of air: new equations for the visible and near infrared. , 1996, Applied optics.

[73]  H Han Haitjema,et al.  Metrology for MEMS; MEMS for Metrology , 2003 .

[74]  Christopher J. Evans,et al.  Application of precision diamond machining to the manufacture of microphotonics components , 2003, SPIE Optics + Photonics.

[75]  Shuichi Dejima,et al.  A surface motor-driven planar motion stage integrated with an XYθZ surface encoder for precision positioning , 2004 .

[76]  Takahisa Masuzawa,et al.  The vibroscanning method for the measurement of micro-hole profiles , 1999 .

[77]  Hans Nørgaard Hansen,et al.  Investigation on the traceability of three dimensional scanning electron microscope measurements based on the stereo-pair technique , 2005 .

[78]  R. Deslattes,et al.  Analytical modeling of the periodic nonlinearity in heterodyne interferometry. , 1998, Applied optics.

[79]  Andrew Yacoot,et al.  The use of x-ray interferometry to investigate the linearity of the NPL Differential Plane Mirror Optical Interferometer , 2000 .

[80]  Harald Bosse,et al.  Developments at PTB in nanometrology for support of the semiconductor industry , 2005 .

[81]  S. Kamisuki,et al.  A high resolution, electrostatically-driven commercial inkjet head , 2000, Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308).

[82]  N. Taniguchi.  Current Status in, and Future Trends of, Ultraprecision Machining and Ultrafine Materials Processing , 1983 .

[83]  Tilo Pfeifer,et al.  Optical Methods for Dimensional Metrology in Production Engineering , 2002 .

[84]  Wolfgang Osten,et al.  Measuring shape and deformation of small objects using digital holography , 1998, Optics & Photonics.

[85]  Takashi Miyoshi,et al.  Nano-Position Sensing Using Optically Motion-controlled Microprobe with PSD Based on Laser Trapping Technique , 2005 .

[86]  Daniele Sinigalliesi.  Dimensional measurement of hard-disk-drive suspensions , 2001 .

[87]  Harald Bosse,et al.  SUPPLEMENTARY COMPARISON: Final report on CCL-S3 supplementary line scale comparison Nano3 , 2003 .

[88]  Jakob S. Jensen,et al.  Topology optimization and fabrication of photonic crystal structures. , 2004, Optics express.

[89]  Phj Piet Schellekens,et al.  Design of a High-Precision 3D-Coordinate Measuring Machine , 1998 .

[90]  T J Quinn,et al.  Practical realization of the definition of the metre, including recommended radiations of other optical frequency standards (2001) , 2003 .

[91]  Heinrich Schwenke,et al.  Opto-tactile Sensor for 2D and 3D Measurement of Small Structures on Coordinate Measuring Machines , 2001 .

[92]  Ichiko Misumi,et al.  Sub-hundred nanometre pitch measurements using an AFM with differential laser interferometers for designing usable lateral scales , 2005 .

[93]  Jeremiah R. Lowney,et al.  Scanning electron microscope analog of scatterometry , 2002, SPIE Advanced Lithography.

[94]  A. Weckenmann,et al.  Probing Systems in Dimensional Metrology , 2004 .

[95]  Takashi Miyoshi,et al.  Development of The Nano-CMM Probe based on Laser Trapping Technology , 1999 .

[96]  B. Edĺen.  The Refractive Index of Air , 1966 .

[97]  M. Esashi,et al.  Electrostatically levitated spherical 3-axis accelerometer , 2002, Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266).

[98]  Ming-Chuan Leu,et al.  Electroforming Process and Application to Micro/Macro Manufacturing , 2001 .

[99]  Mark L. Schattenburg,et al.  The critical role of metrology in nanotechnology , 2002, Workshop on Nanostructure Science, Metrology, and Technology.

[100]  P. I. Borel,et al.  Topology optimised broadband photonic crystal Y-splitter , 2005 .

[101]  Dinesh K. Sood,et al.  Microengineering of magnetic bearings and actuators , 2000, Smart Structures.

[102]  Hans Nørgaard Hansen,et al.  Modelling and Measurement Uncertainty Estimation for Integrated AFM-CMM Instrument , 2005 .

[103]  J Haycocks,et al.  Traceable calibration of transfer standards for scanning probe microscopy , 2005 .

[104]  T.A.M. Ruijl,et al.  Ultra Precision Coordinate Measuring Machine - Design, Calibration and Error Compensation , 2001 .

[105]  R. Thalmann,et al.  Accurate measurement of the refractive index of air , 1994 .

[106]  Fundamental study on the new probe technique for the nano-CMM based on the laser trapping and Mirau interferometer , 1999 .

[107]  Nadeem Hasan Rizvi,et al.  Applications of laser ablation to microengineering , 2000, SPIE High-Power Laser Ablation.

[108]  M. Gijs,et al.  Micromachining of glass inertial sensors , 2002 .

[109]  P L Heydemann,et al.  Determination and correction of quadrature fringe measurement errors in interferometers. , 1981, Applied optics.

[110]  Siebe Bouwstra,et al.  Tantalum oxide thin films as protective coatings for sensors , 1999 .

[111]  Carsten Thirstrup,et al.  Diffractive optical coupling element for surface plasmon resonance sensors , 2004 .

[112]  J. Stümpel,et al.  Combined optical and X–ray interferometry for high–precision dimensional metrology , 2000, Proceedings of the Royal Society of London. Series A: Mathematical, Physical and Engineering Sciences.

[113]  P.H.J. Schellekens,et al.  Study of a Small-sized Ultrasonic Probe , 2006 .