Analytical study on effect of ring geometry on frequency shift of piezoelectric ring-shaped resonator
暂无分享,去创建一个
Jian Lu | Ryutaro Maeda | Takahisa Sagawa | Dong F. Wang | R. Maeda | Jian Lu | T. Sagawa | Takahisa Sagawa
[1] Jian Lu,et al. Design, fabrication, and integration of piezoelectric MEMS devices for applications in wireless sensor network , 2011, 2011 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP).
[2] Mark E. Thompson,et al. A film bulk acoustic resonator in liquid environments , 2005 .
[3] Seokheun Choi,et al. A contour-mode film bulk acoustic resonator of high quality factor in a liquid environment for biosensing applications , 2010 .
[4] Masoud Baghelani,et al. Analysis and suppression of spurious modes of the ring shape anchored RF MEMS contour mode disk resonator , 2011 .
[5] Yu Wang,et al. ZnO-based film bulk acoustic resonator for high sensitivity biosensor applications , 2007 .
[6] T. K. Bhattacharyya,et al. Microelectromechanical resonators for radio frequency communication applications , 2011, ArXiv.
[7] Wei Pang,et al. Piezoelectrically transduced low-impedance microelectromechanical resonators , 2005 .
[8] Ryutaro Maeda,et al. Micromachined Silicon Disk Resonator Transduced by Piezoelectric Lead Zirconate Titanate Thin Films , 2010 .