Modeling of a Neural Electrode with MEMS Magnetic Sensor for Telemetry at Low Frequencies

This paper presents the design and simulation of a biomedical wireless microdevice. Most of the implantable devices require very small dimensions, requiring the use of microtechnologies to obtain the necessary size reduction. One of the most challenging devices to integrate is the antenna, required for devices using a wireless link. The proposed system uses wafer level packaging to integrate the neuro electrodes, the control electronics and the antenna, which is based on a MEMS structure to convert the incoming electromagnetic field to a voltage. It is proposed to use a cantilever, where an electroactive material is proposed as reading mechanism. Despite its implementation simplicity, this mechanism has also the potential to actuate the cantilever for possible radiation. This antenna allows the reception of signals using a carrier in the kHz range and uses only a chip area of 1.5x1.5 mm 2 , and a full system volume of 5x3x1.5 mm 3