Atom Probe Tomography of Electronic Materials

AbstractThe state of application of atom probe tomography to electronic materials is assessed. The benefits and challenges of the technique are discussed with regard to its impact on this field of ...

[1]  Stuart S. P. Parkin,et al.  Giant Magnetoresistance in Magnetic Nanostructures , 1995 .

[2]  Martin L. Green,et al.  Hafnium oxide films by atomic layer deposition for high- κ gate dielectric applications: Analysis of the density of nanometer-thin films , 2005 .

[3]  C. Grovenor,et al.  Pulsed laser atom probe analysis of semiconductor materials , 1986, Microscopy of Semiconducting Materials, 1987.

[4]  G. Schmitz,et al.  Microstructure-controlled interdiffusion of Cu/Co/Au thin films investigated by three-dimensional atom probe , 2003 .

[5]  G. Schmitz,et al.  Thin film interreaction of Al/Ag analyzed by tomographic atom probe , 2002 .

[6]  G. Schmitz,et al.  Influence of the microstructure on the interreaction of Al/Ni investigated by tomographic atom probe , 2002 .

[7]  K. F. Russell,et al.  Strategies for fabricating atom probe specimens with a dual beam FIB. , 2005, Ultramicroscopy.

[8]  Debbie J. Stokes,et al.  Three-dimensional atom probe studies of an InxGa1−xN∕GaN multiple quantum well structure: Assessment of possible indium clustering , 2007 .

[9]  A. Tamion,et al.  Three-dimensional atom probe investigation of Fe/Dy multilayers , 2006 .

[10]  B. Gault,et al.  Investigation of an oxide layer by femtosecond-laser-assisted atom probe tomography , 2006 .

[11]  T. Kelly,et al.  Atomic-Scale Analysis of Metamorphic Magnetite using Field Ion Microscopy and Atom Probe Tomography , 2004, Microscopy and Microanalysis.

[12]  J. Bystrický,et al.  On tests of time reversal invariance in nucleon nucleon scattering , 1984 .

[13]  J. D. Olson,et al.  Intermixing and phase separation at the atomic scale in Co-rich (Co,Fe) and Cu multilayered nanostructures , 2005 .

[14]  J. Kelly,et al.  Thermal stability of Ni–Mn electrodeposits , 2006 .

[15]  D. Larson,et al.  Advances in Atom Probe Specimen Fabrication from Planar Multilayer Thin Film Structures , 2001, Microscopy and Microanalysis.

[16]  A. Petford-Long,et al.  Information storage materials: nanoscale characterisation by three-dimensional atom probe analysis , 2004 .

[17]  A. Petford-Long,et al.  The formation mechanism of aluminum oxide tunnel barriers: Three-dimensional atom probe analysis , 2005 .

[18]  G. Smith,et al.  In situ ion milling of field ion specimens using a liquid metal ion source , 1984 .

[19]  F Vurpillot,et al.  Modeling Image Distortions in 3DAP , 2004, Microscopy and Microanalysis.

[20]  K. Hono,et al.  Three‐dimensional atom probe analysis of a sputter‐deposited Co–Cr thin film , 1995 .

[21]  G. Schmitz,et al.  Atom probe field ion microscopy investigation of the early interreaction stages in Al/Ni couples , 1999 .

[22]  H. Skriver,et al.  Surface energy and work function of elemental metals. , 1992, Physical review. B, Condensed matter.

[23]  J. Kelly,et al.  Effects of current density on the structure of Ni and Ni–Mn electrodeposits , 2005 .

[24]  G. Smith,et al.  Thermal stability of electrodeposited nanocrystalline nickel and iron–nickel alloys , 2001 .

[25]  D. Larson,et al.  Microstructural investigation of Cu/Co multilayer films , 1999 .

[26]  D. Mangelinck,et al.  First stages of the formation of Ni silicide by atom probe tomography , 2006 .

[27]  W. Tyson.  Surface energies of solid metals , 1975 .

[28]  G. Schmitz,et al.  Application of the critical gradient concept to the nucleation of the first-product phase in Co/Al thin films , 2005 .

[29]  G.E. Moore,et al.  Cramming More Components Onto Integrated Circuits , 1998, Proceedings of the IEEE.

[30]  D. Larson,et al.  Characterization of ultralow-energy implants and towards the analysis of three-dimensional dopant distributions using three-dimensional atom-probe tomography , 2006 .

[31]  Kinder,et al.  Large magnetoresistance at room temperature in ferromagnetic thin film tunnel junctions. , 1995, Physical review letters.

[32]  A. Hütten,et al.  Stability and thermal reaction of GMR NiFe/Cu thin films , 2005 .

[33]  K. Hono,et al.  Compositional inhomogeneities in sputtered Co‐Cr magnetic thin films studied by atom probe field ion microscopy , 1994 .

[34]  A. Petford-Long,et al.  The formation mechanism of aluminium oxide tunnel barriers , 2006 .

[35]  John H. Booske,et al.  Three-dimensional atom mapping of dopants in Si nanostructures , 2005 .

[36]  D. Larson.  Atom probe characterization of nanomagnetic materials , 2006 .

[37]  The effects of annealing on magnetic domain structure and interface profile in sputtered Fe/Cr multilayer films , 1993 .

[38]  K. Hono,et al.  Three‐dimensional atom probe analysis of Co–Cr–Ta thin film , 1996 .

[39]  G. Kellogg,et al.  Pulsed-laser atom-probe field-ion microscopy , 1980 .

[40]  A. Petford-Long,et al.  Interfacial diffusion studies in CoPd layered films , 1996 .

[41]  David N. Seidman,et al.  Three-Dimensional Atom-Probe Tomography: Advances and Applications , 2007 .

[42]  L. Lauhon,et al.  Three-dimensional nanoscale composition mapping of semiconductor nanowires. , 2006, Nano letters.

[43]  G. Schmitz,et al.  Nucleation of product phase in reactive diffusion of Al/Co , 2004 .

[44]  Qing He,et al.  Dielectric breakdown in magnetic tunnel junctions having an ultrathin barrier , 2002 .

[45]  A. Petford-Long,et al.  Atomic-scale analysis of CoFe/Cu and CoFe/NiFe interfaces , 2000 .

[46]  Dieter Isheim,et al.  Analysis of Three-dimensional Atom-probe Data by the Proximity Histogram , 2000, Microscopy and Microanalysis.

[47]  D Lawrence,et al.  In situ site-specific specimen preparation for atom probe tomography. , 2007, Ultramicroscopy.

[48]  Peter H. Bartels,et al.  Field ion microscopy;: Principles and applications, , 1969 .

[49]  Mark E. Law,et al.  Continuum based modeling of silicon integrated circuit processing: An object oriented approach , 1998 .

[50]  T. Hashizume,et al.  Atom‐probe investigation of III–V semiconductors: Comparison of voltage‐pulse and laser‐pulse modes , 1986 .

[51]  David J. Larson,et al.  Local Electrode Atom Probes , 1998, Microscopy and Microanalysis.

[52]  Michael K Miller,et al.  Atom Probe Field Ion Microscopy , 1996 .

[53]  D. Larson,et al.  Improvement of multilayer analyses with a three‐dimensional atom probe , 2004 .

[54]  G. Thompson,et al.  The pulse thermal processing of nanocrystalline silicon thin-films , 2004 .

[55]  B. Gorman,et al.  Atomic Scale Compositional and Structural Characterization of Nanostructured Materials Using Combined FIB, STEM, and LEAP , 2006, Microscopy and Microanalysis.

[56]  M. Blamire,et al.  Field-ion specimen preparation using focused ion-beam milling , 1999 .

[57]  T. Al-Kassab,et al.  FIM/AP analysis of CuPd multilayers , 1995 .

[58]  E. Müller.  The atom-probe field ion microscope , 1970, Die Naturwissenschaften.

[59]  R. Wallace,et al.  High-κ gate dielectrics: Current status and materials properties considerations , 2001 .

[60]  F. Danoix,et al.  Nanoscale compositional analysis of Fe/Tb multilayers: A field ion microscopy and tomographic atom probe study , 2000 .

[61]  D. Larson,et al.  Focused ion-beam specimen preparation for atom probe field-ion microscopy characterization of multilayer film structures , 1999 .

[62]  Michael K Miller,et al.  Invited review article: Atom probe tomography. , 2007, The Review of scientific instruments.

[63]  G. Smith,et al.  Three-dimensional atom probe studies of metallic multilayers , 1999 .

[64]  R. Buchheit,et al.  Site-Specific FIB Preparation of Atom Probe Samples , 2004, Microscopy and Microanalysis.

[65]  A. Petford-Long,et al.  Mechanisms by which oxygen acts as a surfactant in giant magnetoresistance film growth , 2003 .

[66]  S. Girvin,et al.  Analysis of high resistivity semiconductor specimens in an energy‐compensated time‐of‐flight atom probe , 1981 .

[67]  G. Schmitz,et al.  Nanoscale analysis of the early interreaction stages in Al/Ni , 2001 .

[68]  J. A. Liddle,et al.  Application of position sensitive atom probe to the study of the microchemistry and morphology of quantum well interfaces , 1989 .

[69]  H. Andren,et al.  A specimen preparation technique for atom probe analysis of the near-surface region of cemented carbides , 1996 .

[70]  R. L. Comstock,et al.  Review Modern magnetic materials in data storage , 2002 .

[71]  K. Hildal,et al.  APT characterization of some iron-based bulk metallic glasses , 2006 .

[72]  C. Humphreys,et al.  Optical and microstructural studies of InGaN∕GaN single-quantum-well structures , 2005 .

[73]  K. F. Russell,et al.  FIB-based Atom Probe Specimen Preparation of Powders , 2006, Microscopy and Microanalysis.

[74]  A. Hütten,et al.  Mismatch-induced recrystallization of giant magneto-resistance multilayer systems , 2006 .

[75]  Etienne,et al.  Giant magnetoresistance of (001)Fe/(001)Cr magnetic superlattices. , 1988, Physical review letters.

[76]  R. Reedy,et al.  InGaAs/GaAs QD superlattices: MOVPE growth, structural and optical characterization, and application in intermediate-band solar cells , 2005, Conference Record of the Thirty-first IEEE Photovoltaic Specialists Conference, 2005..

[77]  G. Schmitz,et al.  Three-dimensional atom probe investigation of Co/Al thin film reaction , 2003 .

[78]  H. Muraoka,et al.  Microstructure and magnetic properties of CoPtCr-SiO/sub 2/ perpendicular recording media , 2002 .

[79]  San Diego,et al.  Pinholes may mimic tunneling , 2000 .

[80]  Richard G. Forbes,et al.  Atom probe tomography , 2000 .

[81]  T. C. Anthony,et al.  Three-dimensional atom probe field-ion microscopy observation of Cu/Co multilayer film structures , 1998 .

[82]  G. Schmitz,et al.  Investigation of oxide tunnel barriers by atom probe tomography (TAP). , 2004, Ultramicroscopy.

[83]  Jing Li,et al.  Quantitative analysis of one-dimensional dopant profile by electron holography , 2002 .

[84]  N. Evans,et al.  Fabrication of specimens of metamorphic magnetite crystals for field ion microscopy and atom probe microanalysis. , 2001, Ultramicroscopy.

[85]  G. Smith,et al.  PULSED LASER ATOM PROBE ANALYSIS OF III-V COMPOUND SEMICONDUCTORS , 1986 .

[86]  A. Ourmazd,et al.  Two-Dimensional Mapping of pn Junctions by Electron Holography , 2000 .

[87]  G. Schmitz,et al.  Microstructural influence on the early stages of interreaction of Al/Ni-investigated by TAP and HREM , 2003 .

[88]  Bernard Dieny,et al.  Magnetotransport properties of magnetically soft spin‐valve structures (invited) , 1991 .

[89]  A. Hütten,et al.  Nanoanalysis of Co/Cu/NiFe thin films by tomographic atom probe , 2001 .

[90]  Yee S. Ng,et al.  ToF Atom-probe mass spectra of GaAs☆ , 1978 .

[91]  T. Tsong,et al.  Photon stimulated field ionization , 1976 .

[92]  A. Petford-Long,et al.  Atom probe analysis and modelling of interfaces in magnetic multilayers , 1992 .

[93]  H. Fraser,et al.  Some aspects of atom probe specimen preparation and analysis of thin film materials. , 2004, Ultramicroscopy.

[94]  B. Gorman,et al.  Minimization of Ga Induced FIB Damage Using Low Energy Clean-up , 2006, Microscopy and Microanalysis.

[95]  Yanfa Yan,et al.  Atomic structure and electronic properties of c-Si∕a-Si:H heterointerfaces , 2006 .

[96]  K. Hono,et al.  Atom probe analysis of sputtered Co–Cr magnetic thin films , 1993 .