Abstract This paper reports initial characterisation results for planar mid-wavelength infrared (MWIR) photodiodes fabricated using a novel reactive ion plasma-induced n-on-p junction formation technology on vacancy-doped p-type HgCdTe grown by LPE on CdZnTe substrates. The junction is formed without the need for post-implant annealing typically required by ion implantation junction formation techniques to repair damage or to move the junction away from damaged regions. The dark current and dynamic resistance, R d , of the fabricated photodiodes have been characterised as a function of temperature. At 80 K, the zero-bias dynamic resistance–junction area product ( R 0 A ) of the diodes is 4.6×10 7 Ω cm 2 , with the devices being diffusion limited down to ∼135 K. Dynamic resistance has been measured for temperatures between 80 and 195 K and biases between −200 and +150 mV. Modelling of the observed dark current has been undertaken using three distinct mechanisms, diffusion, generation–recombination, and trap-assisted tunnelling. The results show that the plasma-induced junction formation technique can produce high-performance planar HgCdTe photodiodes. The dark current mechanisms found in these devices are similar to those found in diodes formed using conventional ion implantation techniques.
[1]
A. Rogalski.
Analysis of the R0A product in n+-p Hg1−xCdxTe photodiodes
,
1988
.
[2]
Scanning laser microscopy of reactive ion etching induced n-type conversion in vacancy-doped p-type HgCdTe
,
1997
.
[3]
Y. Nemirovsky,et al.
Tunneling and 1/f noise currents in HgCdTe photodiodes
,
1992
.
[4]
B. Nener,et al.
Low frequency noise in HgCdTe 3-5 micron IR photovoltaic detectors at elevated temperatures
,
1998,
1998 Conference on Optoelectronic and Microelectronic Materials and Devices. Proceedings (Cat. No.98EX140).
[5]
Yael Nemirovsky,et al.
Tunneling and dark currents in HgCdTe photodiodes
,
1989
.
[6]
Naoki Oda,et al.
Improvement in HgCdTe diode characteristics by low temperature post-implantation annealing
,
1995
.
[7]
A. Tóth,et al.
Type conversion of p-(HgCd)Te using and Ar reactive ion etching
,
1996
.
[8]
Yael Nemirovsky,et al.
Trap‐assisted tunneling in mercury cadmium telluride photodiodes
,
1992
.