论文信息 - High temperature and low pressure chemical vapor deposition of silicon nitride on AlGaN: Band offsets and passivation studies - 字舞流文

High temperature and low pressure chemical vapor deposition of silicon nitride on AlGaN: Band offsets and passivation studies

M. H. Breckenridge | Brian B. Haidet | P. Reddy | Z. Sitar | B. Sarkar | A. Franke | F. Kaess | R. Collazo | E. Kohn | S. Washiyama | L. Hernandez-Balderrama | D. Alden