Micro-cantilever-based fiber optic hydrophone fabricated by a femtosecond laser.

We report an open cavity, cantilever-based fiber optic Fabry-Perot interferometer hydrophone. The hydrophone is made of fused silica material, and its micro-cantilever beam is directly fabricated by femtosecond (fs) laser micromachining. The theoretical analyses and experimental verifications of the frequency response of the sensor are presented.

[1]  Li Han Chen,et al.  High performance chitosan diaphragm-based fiber-optic acoustic sensor , 2010 .

[2]  J. Sader Frequency response of cantilever beams immersed in viscous fluids with applications to the atomic force microscope , 1998 .

[3]  Remco G.P. Sanders,et al.  Fibre-top cantilevers: design, fabrication and applications , 2007 .

[4]  Juncheng Xu,et al.  Diaphragm-based extrinsic Fabry-Perot interferometric optical fiber sensor for acoustic wave detection under high background pressure , 2005 .

[5]  J. Staudenraus,et al.  Fibre-optic probe hydrophone for ultrasonic and shock-wave measurements in water , 1993 .

[6]  Rongqing Hui,et al.  Fiber-optic acoustic pressure sensor based on large-area nanolayer silver diaghragm. , 2014, Optics letters.

[7]  B. Culshaw,et al.  Acousto-ultrasonic sensing using fiber Bragg gratings , 2003 .

[8]  D. Iannuzzi,et al.  Carving fiber-top cantilevers with femtosecond laser micromachining , 2008 .

[9]  P. Beard,et al.  A Fabry-Perot fiber-optic ultrasonic hydrophone for the simultaneous measurement of temperature and acoustic pressure. , 2009, The Journal of the Acoustical Society of America.

[10]  P C Beard,et al.  Optical fiber photoacoustic-photothermal probe. , 1998, Optics letters.

[11]  P. Beard,et al.  Characterization of a polymer film optical fiber hydrophone for use in the range 1 to 20 MHz: A comparison with PVDF needle and membrane hydrophones , 2000, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[12]  Yan Zhou,et al.  Fiber optic acoustic hydrophone with double Mach–Zehnder interferometers for optical path length compensation , 1999 .

[13]  Yoshimura,et al.  Development of an optical fiber hydrophone with fiber Bragg grating , 2000, Ultrasonics.

[14]  P. Beard Biomedical photoacoustic imaging , 2011, Interface Focus.

[15]  Lihong V. Wang,et al.  A practical guide to photoacoustic tomography in the life sciences , 2016, Nature Methods.

[16]  K. Cooper,et al.  All-fused-silica miniature optical fiber tip pressure sensor. , 2006, Optics letters.

[17]  Arnaud Arvengas,et al.  Fiber optic probe hydrophone for the study of acoustic cavitation in water. , 2011, The Review of scientific instruments.

[18]  S. Ourselin,et al.  In-plane ultrasonic needle tracking using a fiber-optic hydrophone. , 2015, Medical physics.

[19]  L. Brown Design considerations for piezoelectric polymer ultrasound transducers , 2000, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

[20]  D. Hand,et al.  Fabricating optical fibre-top cantilevers for temperature sensing , 2014 .

[21]  Edward Z. Zhang,et al.  A miniature all-optical photoacoustic imaging probe , 2011, BiOS.

[22]  Tao Wei,et al.  Fiber inline Michelson interferometer fabricated by a femtosecond laser. , 2012, Optics letters.

[23]  Amardeep Kaur,et al.  High-temperature fiber-optic Fabry-Perot interferometric pressure sensor fabricated by femtosecond laser. , 2013, Optics letters.

[24]  Anbo Wang,et al.  Fiber Fabry-Perot sensors for detection of partial discharges in power transformers. , 2003, Applied optics.

[25]  Matthew O'Donnell,et al.  Optoacoustic imaging using thin polymer étalon , 2005 .