Design and experiments of a linear piezoelectric motor driven by a single mode.

In this contribution, we propose a novel linear piezoelectric motor with a compact stator that is driven by a single mode. The linear piezoelectric motor can realize bidirectional motion by changing the vibration modes of the stator. Finite element analysis is performed to determine the required vibration mode of the stator and obtain the optimal stator structure and dimensions. Furthermore, the trajectories of the driving foot are analyzed with and without consideration of the mechanical contact with the slider. It is shown that the trajectory of the driving foot is an oblique line when disregarding the contact, and the trajectory becomes an oblique ellipse while taking into account the contact. Finally, a prototype of the motor is fabricated based on the results of finite element analysis. The optimization results show that the motor reaches its maximum thrust force of 4.0 kg, maximum thrust-weight ratio of 33.3, maximum unloaded velocity of 385 mm/s under the excitation of Mode-B, and maximum unloaded velocity of 315 mm/s under the excitation of Mode-L.