Improvement of hydrogenated microcrystalline silicon solar cell performance by VHF power profiling technique
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Jian Sun | Xiaodang Zhang | Ying Zhao | X. Geng | G. Hou | Changchun Wei | Xinliang Chen | Jianjun Zhang | De-kun Zhang | Gui-Quing Li | Xiaoyan Han
[1] Meifang Zhu,et al. High quality microcrystalline Si films by hydrogen dilution profile , 2006 .
[2] Don L. Williamson,et al. Hydrogen dilution profiling for hydrogenated microcrystalline silicon solar cells , 2004 .
[3] M. Takashiri,et al. Hollow electrode enhanced RF glow plasma for the fast deposition of microcrystalline silicon , 2003 .
[4] S. Miyazaki,et al. High-rate deposition of highly crystallized silicon films from inductively coupled plasma , 2003 .
[5] A. Matsuda,et al. Key Issue for the Fabrication of High-Efficiency Microcrystalline Silicon Thin-Film Solar Cells at Low Temperatures , 2002 .
[6] G. Bruno,et al. From amorphous to microcrystalline silicon deposition in SiF4–H2–He plasmas: in situ control by optical emission spectroscopy , 2001 .
[7] A. Matsuda,et al. High rate growth of microcrystalline silicon at low temperatures , 2000 .
[8] Diego Fischer,et al. Microcrystalline silicon and micromorph tandem solar cells , 1999 .