Batch Fabrication of Metasurface Holograms Enabled by Plasmonic Cavity Lithography
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Changtao Wang | Xiangang Luo | Mingbo Pu | Zeyu Zhao | Ping Gao | Yunfei Luo | Liu Liqin | Jinjin Jin | Changtao Wang | Zeyu Zhao | Ping Gao | Yunfei Luo | Xiangang Luo | M. Pu | Jinjin Jin | Xiaohu Zhang | Liqin Liu | Xiaohu Zhang | Xiangang Luo
[1] Chih-Ming Wang,et al. Aluminum plasmonic multicolor meta-hologram. , 2015, Nano letters.
[2] Xiangang Luo,et al. Principles of electromagnetic waves in metasurfaces , 2015 .
[3] Yuri S. Kivshar,et al. Grayscale transparent metasurface holograms , 2016 .
[4] Guoxing Zheng,et al. Metasurface holograms reaching 80% efficiency. , 2015, Nature nanotechnology.
[5] Steven Barcelo,et al. Nanoimprint lithography for nanodevice fabrication , 2016, Nano Convergence.
[6] M. Esashi,et al. Sub-Wavelength Pattern Transfer By Near Field Photo-Lithography , 1998, Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135).
[7] Yasin Ekinci,et al. Sub-10 nm patterning using EUV interference lithography , 2011, Nanotechnology.
[8] Xiaoliang Ma,et al. Multicolor 3D meta-holography by broadband plasmonic modulation , 2016, Science Advances.
[9] M. Pu,et al. Broadband spin Hall effect of light in single nanoapertures , 2017, Light: Science & Applications.
[10] Changtao Wang,et al. Squeezing Bulk Plasmon Polaritons through Hyperbolic Metamaterials for Large Area Deep Subwavelength Interference Lithography , 2015 .
[11] Yasuhisa Inao,et al. Near-field lithography as prototype nano-fabrication tool , 2007 .
[12] Q. Gong,et al. Visible-Frequency Dielectric Metasurfaces for Multiwavelength Achromatic and Highly Dispersive Holograms. , 2016, Nano letters.
[13] H. Giessen,et al. Large‐Area Antenna‐Assisted SEIRA Substrates by Laser Interference Lithography , 2014 .
[14] Changtao Wang,et al. Localizing surface plasmons with a metal-cladding superlens for projecting deep-subwavelength patterns , 2009 .
[15] Luping P. Shi,et al. Parallel laser microfabrication of large-area asymmetric split ring resonator metamaterials and its structural tuning for terahertz resonance , 2010 .
[16] Xiang-zhao Wang,et al. Impact of polarized illumination on high NA imaging in ArF immersion lithography at 45 nm node , 2009 .
[17] Mingsheng Zhang,et al. High Contrast Superlens Lithography Engineered by Loss Reduction , 2012 .
[18] N. Fang,et al. SubDiffraction-Limited Optical Imaging with a Silver Superlens , 2005, Science.
[19] K. Cheah,et al. Third Harmonic Generation of Optical Vortices Using Holography‐Based Gold‐Fork Microstructure , 2014 .
[20] Yun Zhou,et al. Tunable Broadband Wavefronts Shaping via Chaotic Speckle Image Holography Carrier Fringes , 2017 .
[21] Wei Zhang,et al. Off Axis Illumination Planar Hyperlens for Non-contacted Deep Subwavelength Demagnifying Lithography , 2014, Plasmonics.
[22] J. Pendry,et al. Negative refraction makes a perfect lens , 2000, Physical review letters.
[23] Jinghua Teng,et al. Silicon multi‐meta‐holograms for the broadband visible light , 2016 .
[24] Wei Zhang,et al. Improving Imaging Contrast of Non-Contacted Plasmonic Lens by Off-Axis Illumination with High Numerical Aperture , 2014, Plasmonics.
[25] Xiangang Luo,et al. Merging plasmonics and metamaterials by two-dimensional subwavelength structures , 2017 .
[26] Parallel laser microfabrication of terahertz metamaterials and its polarization-dependent transmission property , 2010 .
[27] Xianzhong Chen,et al. Metasurface Device with Helicity‐Dependent Functionality , 2016 .
[28] Qiaofeng Tan,et al. Three-dimensional optical holography using a plasmonic metasurface , 2013, Nature Communications.
[29] Xiaohu Zhang,et al. Metasurface-based broadband hologram with high tolerance to fabrication errors , 2016, Scientific Reports.
[30] C. Qiu,et al. Advances in Full Control of Electromagnetic Waves with Metasurfaces , 2016 .
[31] T. Gaylord,et al. Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings , 1995 .
[32] Zhaowei Liu,et al. Far-Field Optical Hyperlens Magnifying Sub-Diffraction-Limited Objects , 2007, Science.
[33] Pattern fabrication by oblique incidence ion‐beam etching , 1981 .
[34] Changtao Wang,et al. Fabrication of anisotropically arrayed nano-slots metasurfaces using reflective plasmonic lithography. , 2015, Nanoscale.
[35] Xiaoliang Ma,et al. Catenary optics for achromatic generation of perfect optical angular momentum , 2015, Science Advances.
[36] Richard J. Blaikie,et al. Nanolithography in the Evanescent Near Field , 2001 .
[37] Changtao Wang,et al. Going far beyond the near-field diffraction limit via plasmonic cavity lens with high spatial frequency spectrum off-axis illumination , 2015, Scientific Reports.
[38] Xiaoliang Ma,et al. Spatially and spectrally engineered spin-orbit interaction for achromatic virtual shaping , 2015, Scientific Reports.
[39] Burn Jeng Lin. Optical lithography—present and future challenges , 2006 .
[40] Ai Qun Liu,et al. High-efficiency broadband meta-hologram with polarization-controlled dual images. , 2014, Nano letters.
[41] Jinghua Teng,et al. Ultrahigh-capacity non-periodic photon sieves operating in visible light , 2015, Nature Communications.
[42] Changtao Wang,et al. Deep sub-wavelength imaging lithography by a reflective plasmonic slab. , 2013, Optics express.
[43] Vladimir M. Shalaev,et al. Metasurface holograms for visible light , 2013, Nature Communications.
[44] Xiangang Luo,et al. Surface plasmon resonant interference nanolithography technique , 2004 .
[45] Changtao Wang,et al. Ultrabroadband superoscillatory lens composed by plasmonic metasurfaces for subdiffraction light focusing , 2015 .