论文信息 - Control of Nano-Step Structures on Sapphire Wafer Surface by Focused Ion Beam Processing - 字舞流文

Control of Nano-Step Structures on Sapphire Wafer Surface by Focused Ion Beam Processing

M. Yoshimoto | S. Tagawa | S. Seki | K. Koyama | K. Sunakawa | Yoshinori Matsui | W. Hara | Atsuko Takeuchi | T. Kotaki | Y. Yaguchi | M. Murasugi