论文信息 - Effect of NH3 thermal treatment on an atomic layer deposited on tungsten films and formation of W–B–N - 字舞流文

Effect of NH3 thermal treatment on an atomic layer deposited on tungsten films and formation of W–B–N

Hyoungsub Kim | R. Jackson | Sang-Yun Lee | A. Gelatos | Tong Zhang | A. Yoon | R. Thakur | J. Byun | A. Mak | Amy Zhang