Effect of different proof mass supports on accelerometer sensitivity

The present paper deals with the effect of folded beam and spring support incorporated to the proof mass on comb displacement and sensitivity. The study is made for folded beam and spring type support. All the experiments are carried out on COMSOL Multiphysics 4.3 simulation tool.

[1]  A. Manut,et al.  Effects of Mechanical Geometries on Resonance Sensitivity of MEMS Out-of-Plane Accelerometer , 2006, 2006 IEEE International Conference on Semiconductor Electronics.

[2]  K.E. Petersen,et al.  Silicon as a mechanical material , 1982, Proceedings of the IEEE.

[3]  Weiyuan Wang,et al.  Micromachined accelerometer with area-changed capacitance , 2001 .

[4]  Byeungleul Lee,et al.  A Capacitive Silicon Microaccelerometer With Force Balancing Electrodes , 1998, Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135).

[5]  P. Touboul,et al.  Capacitive detection scheme for space accelerometers applications , 1999 .