论文信息 - Neutralization of acceptors in silicon by atomic hydrogen

Neutralization of acceptors in silicon by atomic hydrogen

Atomic hydrogen can neutralize the following acceptors in silicon: boron, aluminum, gallium, and indium. Up to 1019 B cm−3 have been neutralized. Hydrogen penetration seems to follow a diffusive transport that is impeded by the concentration of binding sites.

Jacques I. Pankove | J. Pankove | J. E. Berkeyheiser | R. O. Wance

[1] R. G. Mazur,et al. A Spreading Resistance Technique for Resistivity Measurements on Silicon , 1966 .

[2] J. I. Hanoka,et al. Hydrogen diffusion along passivated grain boundaries in silicon ribbon , 1984 .

[3] J. Pankove,et al. Neutralization of Shallow Acceptor Levels in Silicon by Atomic Hydrogen , 1983 .

[4] J. Sun,et al. Deactivation of the boron acceptor in silicon by hydrogen , 1983 .